Reference Type | Journal (article/letter/editorial) |
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Title | Physical properties of thermally evaporated silicon films nitrided at different rf plasma-processing time |
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Journal | Journal of Materials Science |
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Authors | Mohamed, S. H. | Author |
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Raaif, M. | Author |
Abd El-Rahman, A. M. | Author |
Year | 2012 (March) | Volume | 47 |
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Publisher | Springer Science and Business Media LLC |
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DOI | doi:10.1007/s10853-011-6117-0Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 10011066 | Long-form Identifier | mindat:1:5:10011066:5 |
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GUID | 0 |
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Full Reference | Mohamed, S. H., Raaif, M., Abd El-Rahman, A. M. (2012) Physical properties of thermally evaporated silicon films nitrided at different rf plasma-processing time. Journal of Materials Science, 47. 2875-2881 doi:10.1007/s10853-011-6117-0 |
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Plain Text | Mohamed, S. H., Raaif, M., Abd El-Rahman, A. M. (2012) Physical properties of thermally evaporated silicon films nitrided at different rf plasma-processing time. Journal of Materials Science, 47. 2875-2881 doi:10.1007/s10853-011-6117-0 |
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In | (n.d.) Journal of Materials Science Vol. 47. Springer Science and Business Media LLC |
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