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Lunk, A., Basner, R. (1991) Langmuir probe plasma diagnostics during TiNx deposition. Materials Science and Engineering: A, 139. 41-44 doi:10.1016/0921-5093(91)90593-c

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Reference TypeJournal (article/letter/editorial)
TitleLangmuir probe plasma diagnostics during TiNx deposition
JournalMaterials Science and Engineering: A
AuthorsLunk, A.Author
Basner, R.Author
Year1991 (July)Volume139
PublisherElsevier BV
DOIdoi:10.1016/0921-5093(91)90593-cSearch in ResearchGate
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Mindat Ref. ID10020774Long-form Identifiermindat:1:5:10020774:7
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Full ReferenceLunk, A., Basner, R. (1991) Langmuir probe plasma diagnostics during TiNx deposition. Materials Science and Engineering: A, 139. 41-44 doi:10.1016/0921-5093(91)90593-c
Plain TextLunk, A., Basner, R. (1991) Langmuir probe plasma diagnostics during TiNx deposition. Materials Science and Engineering: A, 139. 41-44 doi:10.1016/0921-5093(91)90593-c
In(n.d.) Materials Science and Engineering: A Vol. 139. Elsevier BV

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Möhl, W. (1991) Plasma diagnostics of an ECR ion beam system. Materials Science and Engineering: A, 139. 6-8 doi:10.1016/0921-5093(91)90585-b
Behrndt, H., Lunk, A. (1991) Biocompatibility of TiN preclinical and clinical investigations. Materials Science and Engineering: A, 139. 58-60 doi:10.1016/0921-5093(91)90596-f
Griem, H.R. (1991) In situ diagnostics/spectroscopy. Materials Science and Engineering: A, 139. 1-5 doi:10.1016/0921-5093(91)90584-a
Lunk, A. (1991) Deposition of hard coatings by a hollow-cathode arc evaporation device. Materials Science and Engineering: A, 140. 666-669 doi:10.1016/0921-5093(91)90493-7
Pfender, E., Zhu, H., Lau, Y.C. (1991) Plasma deposition of superconducting films. Materials Science and Engineering: A, 139. 352-355 doi:10.1016/0921-5093(91)90640-9
Kelm, G., Jungnickel, G. (1991) Hydrogen in plasma-enhanced chemical vapour deposition insulating films. Materials Science and Engineering: A, 139. 401-407 doi:10.1016/0921-5093(91)90649-8
Miyake, Shoji, Chen, Wei (1991) Characterization of electron cyclotron resonance process plasma and film deposition. Materials Science and Engineering: A, 139. 294-301 doi:10.1016/0921-5093(91)90632-w
Collins, G.A., Hutchings, R., Tendys, J. (1991) Plasma immersion ion implantation of steels. Materials Science and Engineering: A, 139. 171-178 doi:10.1016/0921-5093(91)90613-r
Colligon, J.S. (1991) Applications of ion-beam-assisted deposition. Materials Science and Engineering: A, 139. 199-206 doi:10.1016/0921-5093(91)90617-v
(1991) Editorial Board. Materials Science and Engineering: A, 139. doi:10.1016/0921-5093(91)90582-8
Czerwiec, T., Anoun, K., Remy, M., Michel, H. (1991) Structural study of titanium nitride coating interfaces related to plasma diagnostics. Materials Science and Engineering: A, 139. 276-283 doi:10.1016/0921-5093(91)90629-2
 
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