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Hao, Junying, Xu, Tao, Liu, Weimin (2005) Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system. Materials Science and Engineering: A, 408. 297-302 doi:10.1016/j.msea.2005.08.146

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Reference TypeJournal (article/letter/editorial)
TitlePreparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system
JournalMaterials Science and Engineering: A
AuthorsHao, JunyingAuthor
Xu, TaoAuthor
Liu, WeiminAuthor
Year2005 (November)Volume408
PublisherElsevier BV
DOIdoi:10.1016/j.msea.2005.08.146Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID10033255Long-form Identifiermindat:1:5:10033255:5
GUID0
Full ReferenceHao, Junying, Xu, Tao, Liu, Weimin (2005) Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system. Materials Science and Engineering: A, 408. 297-302 doi:10.1016/j.msea.2005.08.146
Plain TextHao, Junying, Xu, Tao, Liu, Weimin (2005) Preparation and characterization of hydrogenated carbon nitride films synthesized by dual DC-RF plasma system. Materials Science and Engineering: A, 408. 297-302 doi:10.1016/j.msea.2005.08.146
In(n.d.) Materials Science and Engineering: A Vol. 408. Elsevier BV

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Hao, Junying, Xu, Tao, Liu, Weimin (2005) Effect of deposition pressure on microstructure and properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD. Journal of Non-Crystalline Solids, 351 (49) 3671-3676 doi:10.1016/j.jnoncrysol.2005.10.013
Hao, Junying, Liu, Weimin, Xue, Qunji (2007) Effect of N2/CH4 flow ratio on microstructure and composition of hydrogenated carbon nitride films prepared by a dual DC-RF plasma system. Journal of Non-Crystalline Solids, 353 (2) 136-142 doi:10.1016/j.jnoncrysol.2006.10.008
Hao, Junying, Xu, Tao, Zhang, Junyan, Liu, Weimin (2006) Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD. Journal of Physics D: Applied Physics, 39. 1149-1155 doi:10.1088/0022-3727/39/6/021
Li, Hongxuan, Xu, Tao, Chen, Jianmin, Zhou, Huidi, Liu, Huiwen (2003) Preparation and characterization of hydrogenated diamond-like carbon films in a dual DC-RF plasma system. Journal of Physics D: Applied Physics, 36. 3183-3190 doi:10.1088/0022-3727/36/24/014
Ding, Jun, Hao, Junying, Xue, Qunji, Liu, Weimin (2008) Effect of deposition pressure on the adhesion and tribological properties of a-CN x H films prepared by DC-RF-PECVD. Journal of Materials Science, 43. 645-651 doi:10.1007/s10853-007-2149-x
Liu, Xiaoqiang, Yang, Jun, Hao, Junying, Zheng, Jianyun, Gong, Qiuyu, Liu, Weimin (2012) A Near-Frictionless and Extremely Elastic Hydrogenated Amorphous Carbon Film with Self-Assembled Dual Nanostructure. Advanced Materials, 24. 4614-4617 doi:10.1002/adma.201200085
Li, H.X, Xu, T, Chen, J.M, Zhou, H.D, Liu, H.W (2004) The effect of applied dc bias voltage on the properties of a-C:H films prepared in a dual dc–rf plasma system. Applied Surface Science, 227. 364-372 doi:10.1016/j.apsusc.2003.12.013
Zheng, Jianyun, Hao, Junying, Liu, Xiaoqiang, Gong, Qiuyu, Liu, Weimin (2013) TiN/TiCN multilayer films modified by argon plasma treatment. Applied Surface Science, 280. 764-771 doi:10.1016/j.apsusc.2013.05.058
Liu, Xiaoqiang, Hao, Junying, Yang, Jun, Zheng, Jianyun, Liang, Yongmin, Liu, Weimin (2011) Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum. Journal of Applied Physics, 110 (5). 53507pp. doi:10.1063/1.3626929
Lu, Xiaolong, Zhang, Xiao, Lu, Yan, Wang, Cong, Hao, Junying, Liu, Weimin (2025) Characterization and wear role of (CrAlVTiNb)Nx high-entropy alloy nitride films deposited by high power impulse magnetron sputtering. Journal of Alloys and Compounds, 1020. doi:10.1016/j.jallcom.2025.179395
Li, Fei, Cheng, Jun, Zhu, Shengyu, Hao, Junying, Yang, Jun, Liu, Weimin (2017) Microstructure and mechanical properties of Ni-based high temperature solid-lubricating composites. Materials Science and Engineering: A, 682. 475-481 doi:10.1016/j.msea.2016.11.069
 
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