Reference Type | Journal (article/letter/editorial) |
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Title | GRAIN REFINEMENT OF CVD TiC LAYERS BY AlCl3, ZrCl4 AND BCl3 IMPURITIES |
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Journal | Le Journal de Physique IV |
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Authors | OSADA, A. | Author |
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DANZINGER, M. | Author |
HAUBNER, R. | Author |
LUX, B. | Author |
Year | 1991 (September) | Volume | 2 |
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Publisher | EDP Sciences |
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DOI | doi:10.1051/jp4:1991266Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 10295556 | Long-form Identifier | mindat:1:5:10295556:1 |
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GUID | 0 |
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Full Reference | OSADA, A., DANZINGER, M., HAUBNER, R., LUX, B. (1991) GRAIN REFINEMENT OF CVD TiC LAYERS BY AlCl3, ZrCl4 AND BCl3 IMPURITIES. Le Journal de Physique IV, 2. doi:10.1051/jp4:1991266 |
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Plain Text | OSADA, A., DANZINGER, M., HAUBNER, R., LUX, B. (1991) GRAIN REFINEMENT OF CVD TiC LAYERS BY AlCl3, ZrCl4 AND BCl3 IMPURITIES. Le Journal de Physique IV, 2. doi:10.1051/jp4:1991266 |
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In | (n.d.) Le Journal de Physique IV Vol. 2. EDP Sciences |
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