Reference Type | Journal (article/letter/editorial) |
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Title | In situ mass spetrometry during laser-induced chemical vapor deposition of silicon carbonitride |
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Journal | Le Journal de Physique IV |
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Authors | Korevaar, G. | Author |
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Besling, W. | Author |
Goossens, A. | Author |
Schoonman, J. | Author |
Year | 1999 (September) | Volume | 9 |
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Publisher | EDP Sciences |
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DOI | doi:10.1051/jp4:1999896Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 10301116 | Long-form Identifier | mindat:1:5:10301116:7 |
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GUID | 0 |
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Full Reference | Korevaar, G., Besling, W., Goossens, A., Schoonman, J. (1999) In situ mass spetrometry during laser-induced chemical vapor deposition of silicon carbonitride. Le Journal de Physique IV, 9. doi:10.1051/jp4:1999896 |
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Plain Text | Korevaar, G., Besling, W., Goossens, A., Schoonman, J. (1999) In situ mass spetrometry during laser-induced chemical vapor deposition of silicon carbonitride. Le Journal de Physique IV, 9. doi:10.1051/jp4:1999896 |
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In | (n.d.) Le Journal de Physique IV Vol. 9. EDP Sciences |
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