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Liskovskaya, T. I., Bulusheva, L. G., Okotrub, A. V., Krupoder, S. A., Semyannikov, P. P., Asanov, I. P., Igumenov, I. K., Manaev, A. V., Traven, V. F., Cherkov, A. G. (2001) (HFA)Cu . 1,5-COD as the prospective precursor for CVD-technologies : The electronic structure, thermodynamical properties and process of formation of thin copper films. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001309

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Reference TypeJournal (article/letter/editorial)
Title(HFA)Cu . 1,5-COD as the prospective precursor for CVD-technologies : The electronic structure, thermodynamical properties and process of formation of thin copper films
JournalLe Journal de Physique IV
AuthorsLiskovskaya, T. I.Author
Bulusheva, L. G.Author
Okotrub, A. V.Author
Krupoder, S. A.Author
Semyannikov, P. P.Author
Asanov, I. P.Author
Igumenov, I. K.Author
Manaev, A. V.Author
Traven, V. F.Author
Cherkov, A. G.Author
Year2001 (August)Volume11
PublisherEDP Sciences
DOIdoi:10.1051/jp4:2001309Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID10302004Long-form Identifiermindat:1:5:10302004:6
GUID0
Full ReferenceLiskovskaya, T. I., Bulusheva, L. G., Okotrub, A. V., Krupoder, S. A., Semyannikov, P. P., Asanov, I. P., Igumenov, I. K., Manaev, A. V., Traven, V. F., Cherkov, A. G. (2001) (HFA)Cu . 1,5-COD as the prospective precursor for CVD-technologies : The electronic structure, thermodynamical properties and process of formation of thin copper films. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001309
Plain TextLiskovskaya, T. I., Bulusheva, L. G., Okotrub, A. V., Krupoder, S. A., Semyannikov, P. P., Asanov, I. P., Igumenov, I. K., Manaev, A. V., Traven, V. F., Cherkov, A. G. (2001) (HFA)Cu . 1,5-COD as the prospective precursor for CVD-technologies : The electronic structure, thermodynamical properties and process of formation of thin copper films. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001309
In(n.d.) Le Journal de Physique IV Vol. 11. EDP Sciences

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Bulusheva, L. G., Okotrub, A. V., Liskovskaya, T. I., Krupoder, S. A., Gusel'nikov, A. V., Manaev, A. V., Traven, V. F. (2001) Electronic Structure of 1,5-Cyclooctadiene-copper(I)-hexafluoroacetylacetonate. The Journal of Physical Chemistry A, 105 (35). 8200-8205 doi:10.1021/jp004531l
Semyannikov, P. P., Igumenov, I. K., Trubin, S. V., Asanov, I. P. (2001) In situ mass spectrometry during thermal CVD of the tris-acetylacetonates of 3-d transition metals. Le Journal de Physique IV, 11. doi:10.1051/jp4:20013125
Morozova, N. B., Zharkova, G. I., Semyannikov, P. P., Sysoev, S. V., Igumenov, I. K., Fedotova, N. E., Gelfond, N. V. (2001) Vapor pressure of precursors for CVD on the base of platinum group metals. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001377
Bakovets, V. V., Gelfond, N. V., Mitkin, V. N., Levashova, T. M., Dolgovesova, I. P., Ratushnjak, V. T., Martynets, V. G. (2001) Metal and oxide thin film MO CVD as a base for nanostructure and superlattice formation. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001371
Igumenov, I. K., Turgambaeva, A. E., Semyannikov, P. P. (2001) General aspects of surface chemistry of metal β-diketonates. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001364
Vidal, S., Maury, F., Gleizes, A., Chen, T.-Y., Doppelt, P. (1999) Photo-MOCVD of Cu thin films using Cu(hfa)(MHY) as precursor. Le Journal de Physique IV, 9. doi:10.1051/jp4:19998100
Gelfond, N. V., Galkin, P. S., Igumenov, I. K., Morozova, N. B., Fedotova, N. E., Zharkova, G. I., Shubin, Yu. V. (2001) MO CVD obtaining composite coatings from metal of platinum group on titanium electrodes. Le Journal de Physique IV, 11. doi:10.1051/jp4:2001375
Chromik, S., De Barros, D., Strbik, V., Odier, P., Sin, A., Hanic, F., Kostic, I. (2001) Hg-cuprate thin films prepared using Re and fluorides based precursor thin films. Le Journal de Physique IV, 11. doi:10.1051/jp4:20011128
Turgambaeva, A. E., Krisyuk, V. V., Bykov, A. F., Igumenov, I. K. (1999) Routes of metal oxide formation from metal β-diketonates used as CVD precursors. Le Journal de Physique IV, 9. doi:10.1051/jp4:1999808
Liskovskaya, T. I., Semyannikov, P. P., Baidina, I. A., Stabnikov, P. A., Pervukhina, N. V., Logvinenko, V. A., Igumenov, I. K., Sokolov, I. E. (2006) Thermal investigation of bis(methoxy-β-diketonates) of copper(II) — novel CVD precursors of copper films. Crystal structure of bis(2,2,6,8-tetramethyl-6-methoxynonan-3,5-dionato)copper(II). Journal of Structural Chemistry, 47 (4). 726-734 doi:10.1007/s10947-006-0361-1
Semyannikov, P. P., Grankin, V. M., Igumenov, I. K., Zharkova, G. I. (1995) Mechanism of Interaction of Dimethylgold(III) Chelates Vapour with Hot Surface. Le Journal de Physique IV, 5. doi:10.1051/jphyscol:1995524
 
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