Meichsner, Jürgen, Wegner, Thomas (2018) Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model. The European Physical Journal D, 72. doi:10.1140/epjd/e2018-80720-0
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model | ||
| Journal | The European Physical Journal D | ||
| Authors | Meichsner, Jürgen | Author | |
| Wegner, Thomas | Author | ||
| Year | 2018 (May) | Volume | 72 |
| Publisher | Springer Science and Business Media LLC | ||
| DOI | doi:10.1140/epjd/e2018-80720-0Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 10362220 | Long-form Identifier | mindat:1:5:10362220:2 |
| GUID | 0 | ||
| Full Reference | Meichsner, Jürgen, Wegner, Thomas (2018) Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model. The European Physical Journal D, 72. doi:10.1140/epjd/e2018-80720-0 | ||
| Plain Text | Meichsner, Jürgen, Wegner, Thomas (2018) Evaluation of oxygen species during E–H transition in inductively coupled RF plasmas: combination of experimental results with global model. The European Physical Journal D, 72. doi:10.1140/epjd/e2018-80720-0 | ||
| In | (n.d.) The European Physical Journal D Vol. 72. Springer Science and Business Media LLC | ||
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