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Nonaka, Shigehiko (1992) Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions. Journal of the Physical Society of Japan, 61 (5). 1449-1452 doi:10.1143/jpsj.61.1449

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Reference TypeJournal (article/letter/editorial)
TitleMode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions
JournalJournal of the Physical Society of Japan
AuthorsNonaka, ShigehikoAuthor
Year1992 (May 15)Volume61
Issue5
PublisherPhysical Society of Japan
DOIdoi:10.1143/jpsj.61.1449Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID11203693Long-form Identifiermindat:1:5:11203693:9
GUID0
Full ReferenceNonaka, Shigehiko (1992) Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions. Journal of the Physical Society of Japan, 61 (5). 1449-1452 doi:10.1143/jpsj.61.1449
Plain TextNonaka, Shigehiko (1992) Mode Identification of Electromagnetic Waves for Large-Area Planar RF Plasma Productions. Journal of the Physical Society of Japan, 61 (5). 1449-1452 doi:10.1143/jpsj.61.1449
In(1992, May) Journal of the Physical Society of Japan Vol. 61 (5) Physical Society of Japan

See Also

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N onaka, Shigehiko (1994) Proposal of Non-Cylindrical and Large-Area RF Plasma Productions by Surface Wave. Journal of the Physical Society of Japan, 63 (8). 3185-3186 doi:10.1143/jpsj.63.3185
Nonaka, Shigehiko (1994) Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors. Japanese Journal of Applied Physics, 33. 4226-4231 doi:10.1143/jjap.33.4226
Nonaka, Shigehiko (1995) Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors. Japanese Journal of Applied Physics, 34 (3) 1711 doi:10.1143/jjap.34.1711
Nonaka, Shigehiko (1992) Ion Contributions to Planar Radio-Frequency Plasmas Produced by Surface Wave. Journal of the Physical Society of Japan, 61 (10). 3576-3586 doi:10.1143/jpsj.61.3576
Nonaka, Shigehiko (1990) Mode Coupling Phenomena of Longitudinal Quarter-Wavelength Resonance of a Plasma Column Produced by Surface Waves. Journal of the Physical Society of Japan, 59 (5). 1623-1632 doi:10.1143/jpsj.59.1623
Nonaka, Shigehiko (1995) Dispersion and Attenuation Characteristics of Electromagnetic Waves Propagating along a Plane Conductor. Journal of the Physical Society of Japan, 64 (11). 4495 doi:10.1143/jpsj.64.4495b
Nonaka, Shigehiko (1993) Dispersion and Attenuation Characteristics of Electromagnetic Waves Propagating along a Plane Conductor. Journal of the Physical Society of Japan, 62 (4). 1233-1244 doi:10.1143/jpsj.62.1233
Nonaka, Shigehiko (1991) General Characteristics of the Maintenance Electric Fieldsin Planar Radio Frequency Discharges. Journal of the Physical Society of Japan, 60 (9). 3015-3024 doi:10.1143/jpsj.60.3015
Nonaka, Shigehiko (1991) Fundamental Theory for Magnetized Radio-Frequency Dischargesbetween Planar Electrodes and Its Application to the ECR Case*. Journal of the Physical Society of Japan, 60 (12). 4133-4145 doi:10.1143/jpsj.60.4133
Nonaka, Shigehiko (1993) Propagation Characteristics and Mode Utilizability of Electromagnetic RF and Optical Surface Waves Travelling between a Pair of Metal Sheets. Japanese Journal of Applied Physics, 32. 2878-2885 doi:10.1143/jjap.32.2878
Nonaka, Shigehiko (1989) Observation of Resonance of a Low Frequency Surface Wave Produced Plasma Column. Journal of the Physical Society of Japan, 58 (3). 1122-1123 doi:10.1143/jpsj.58.1122
 
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