Reference Type | Journal (article/letter/editorial) |
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Title | Capacitive Radio Frequency Discharge Plasma Containing Negative Ions |
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Journal | Journal of the Physical Society of Japan |
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Authors | Amemiya, Hiroshi | Author |
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Yasuda, Noboru | Author |
Year | 1997 (March 15) | Volume | 66 |
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Issue | 3 |
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Publisher | Physical Society of Japan |
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DOI | doi:10.1143/jpsj.66.623Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 11207065 | Long-form Identifier | mindat:1:5:11207065:0 |
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GUID | 0 |
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Full Reference | Amemiya, Hiroshi, Yasuda, Noboru (1997) Capacitive Radio Frequency Discharge Plasma Containing Negative Ions. Journal of the Physical Society of Japan, 66 (3). 623-632 doi:10.1143/jpsj.66.623 |
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Plain Text | Amemiya, Hiroshi, Yasuda, Noboru (1997) Capacitive Radio Frequency Discharge Plasma Containing Negative Ions. Journal of the Physical Society of Japan, 66 (3). 623-632 doi:10.1143/jpsj.66.623 |
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In | (1997, March) Journal of the Physical Society of Japan Vol. 66 (3) Physical Society of Japan |
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