Reference Type | Journal (article/letter/editorial) |
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Title | Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF4 |
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Journal | Journal of the Physical Society of Japan |
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Authors | Takeda, Akihide | Author |
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Ikuta, Nobuaki | Author |
Year | 1997 (June 15) | Volume | 66 |
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Issue | 6 |
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Publisher | Physical Society of Japan |
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DOI | doi:10.1143/jpsj.66.1672Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 11207188 | Long-form Identifier | mindat:1:5:11207188:6 |
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GUID | 0 |
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Full Reference | Takeda, Akihide, Ikuta, Nobuaki (1997) Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF4. Journal of the Physical Society of Japan, 66 (6). 1672-1687 doi:10.1143/jpsj.66.1672 |
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Plain Text | Takeda, Akihide, Ikuta, Nobuaki (1997) Analyses of Spatially Resolved Electron Energy Distribution and Transport Properties in Steady State in CF4. Journal of the Physical Society of Japan, 66 (6). 1672-1687 doi:10.1143/jpsj.66.1672 |
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In | (1997, June) Journal of the Physical Society of Japan Vol. 66 (6) Physical Society of Japan |
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