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Chiu, Yi Jui, Yang, Chia Hao, Chang, Luh Maan, Leong, Khai Shoon (2013) The Study of HEPA/ULPA Filter Efficiency Certification with Properties of Semiconductor Materials in Semiconductor Industry. Advanced Materials Research, 643. 120-124 doi:10.4028/www.scientific.net/amr.643.120

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Reference TypeJournal (article/letter/editorial)
TitleThe Study of HEPA/ULPA Filter Efficiency Certification with Properties of Semiconductor Materials in Semiconductor Industry
JournalAdvanced Materials Research
AuthorsChiu, Yi JuiAuthor
Yang, Chia HaoAuthor
Chang, Luh MaanAuthor
Leong, Khai ShoonAuthor
Year2013 (January)Volume643
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/amr.643.120Search in ResearchGate
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Mindat Ref. ID11700931Long-form Identifiermindat:1:5:11700931:0
GUID0
Full ReferenceChiu, Yi Jui, Yang, Chia Hao, Chang, Luh Maan, Leong, Khai Shoon (2013) The Study of HEPA/ULPA Filter Efficiency Certification with Properties of Semiconductor Materials in Semiconductor Industry. Advanced Materials Research, 643. 120-124 doi:10.4028/www.scientific.net/amr.643.120
Plain TextChiu, Yi Jui, Yang, Chia Hao, Chang, Luh Maan, Leong, Khai Shoon (2013) The Study of HEPA/ULPA Filter Efficiency Certification with Properties of Semiconductor Materials in Semiconductor Industry. Advanced Materials Research, 643. 120-124 doi:10.4028/www.scientific.net/amr.643.120
In(n.d.) Advanced Materials Research Vol. 643. Trans Tech Publications, Ltd.

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