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Song, Jie, Guo, Yan Qing, Song, Chao, Wang, Xiang (2012) Photoluminescence Properties of Silicon Nitride Prepared by VHF-PECVD. Key Engineering Materials, 531. 392-395 doi:10.4028/www.scientific.net/kem.531-532.392

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Reference TypeJournal (article/letter/editorial)
TitlePhotoluminescence Properties of Silicon Nitride Prepared by VHF-PECVD
JournalKey Engineering Materials
AuthorsSong, JieAuthor
Guo, Yan QingAuthor
Song, ChaoAuthor
Wang, XiangAuthor
Year2012 (December)Volume531
PublisherTrans Tech Publications, Ltd.
DOIdoi:10.4028/www.scientific.net/kem.531-532.392Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID12014672Long-form Identifiermindat:1:5:12014672:9
GUID0
Full ReferenceSong, Jie, Guo, Yan Qing, Song, Chao, Wang, Xiang (2012) Photoluminescence Properties of Silicon Nitride Prepared by VHF-PECVD. Key Engineering Materials, 531. 392-395 doi:10.4028/www.scientific.net/kem.531-532.392
Plain TextSong, Jie, Guo, Yan Qing, Song, Chao, Wang, Xiang (2012) Photoluminescence Properties of Silicon Nitride Prepared by VHF-PECVD. Key Engineering Materials, 531. 392-395 doi:10.4028/www.scientific.net/kem.531-532.392
In(n.d.) Key Engineering Materials Vol. 531. Trans Tech Publications, Ltd.

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Guo, Yan Qing, Wang, Xiang, Song, Chao, Huang, Rui, Song, Jie (2012) Influence of Radio Frequency Power on the Structural Properties of nc-Si Films Fabricated by VHF-PECVD. Key Engineering Materials, 531. 469-472 doi:10.4028/www.scientific.net/kem.531-532.469
Huang, Rui, Song, Jie, Guo, Yan Qing, Song, Chao, Wang, Xiang (2012) Evolution of Defect Photoluminescence in Annealed N-Rich a-SiNx:H Films. Key Engineering Materials, 531. 234-237 doi:10.4028/www.scientific.net/kem.531-532.234
Song, Chao, Guo, Yan Qing, Wang, Xiang, Song, Jie, Huang, Rui (2012) Microstructures and Photoluminescence of a-Si:H/a-SiNx Multilayers Annealed at Different Temperature. Key Engineering Materials, 531. 465-468 doi:10.4028/www.scientific.net/kem.531-532.465
Wang, Xiang, Chao, Song, Guo, Yan Qing, Song, Jie, Huang, Rui (2012) Abnormal Capacitance Hysteresis Phenomena in Stacked Nanocrystalline-Si Based Metal Insulator Semiconductor Memory Structure. Key Engineering Materials, 531. 547-550 doi:10.4028/www.scientific.net/kem.531-532.547
Song, Chao, Huang, Rui, Wang, Xiang, Guo, Yanqing, Song, Jie, Zhang, Yixiong, Zheng, Zehao (2011) Effects of hydrogen on photoluminescence properties of a-SiNx:H films prepared by VHF-PECVD. Applied Surface Science, 258. 1290-1293 doi:10.1016/j.apsusc.2011.07.071
Huang, Rui, Wang, Xiang, Guo, Yanqing, Song, Jie, Zhang, Yixiong, Song, Chao (2012) Effects of Hydrogen on Luminescence Properties of A-Sinx Films Prepared by Vhf-Pecvd. Physics Procedia, 32. 417-422 doi:10.1016/j.phpro.2012.03.579
Huang, Rui, Wang, Xiang, Guo, Yanqing, Song, Jie, Zhang, Yixiong, Song, Chao (2012) Erratum to ‘Effects of hydrogen on luminescence properties of a-SiNx films prepared by VHF-PECVD’. Physics Procedia, 32. 947pp. doi:10.1016/j.phpro.2012.10.002
Song, Jie, Guo, Yan Qing, Wang, Xiang, Zhang, Yi Xiong, Song, Chao, Huang, Rui (2010) Photoluminescence Characteristics of Silicon Oxynitride Films at Different Annealing Temperatures. Materials Science Forum, 663. 336-339 doi:10.4028/www.scientific.net/msf.663-665.336
Song, Chao, Lin, Zhen Xu, Zhang, Yi, Wang, Xiang, Guo, Yan Qing, Song, Jie, Huang, Rui (2016) Investigation of Structural, Optical an Electrical Characterization of AZO Films Used for Solar Cells. Key Engineering Materials, 703. 214-218 doi:10.4028/www.scientific.net/kem.703.214
Li, Meng Shan, Liu, Bing Xiang, Wu, Yan (2012) Model of Predicting Polymer Melt Temperature Field by BP Neural Networks. Key Engineering Materials, 531. 425-428 doi:10.4028/www.scientific.net/kem.531-532.425
Zhang, Xiao Yan (2012) Study on the Copolymer Properties of Phenolic Resin-Epoxy Resin. Key Engineering Materials, 531. 73-78 doi:10.4028/www.scientific.net/kem.531-532.73
 
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