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Ishikawa, Itsuo, Iino, Toshiaki, Suganomata, Shinji (1978) Low Energy Components of Ions Extracted from an RF Ion Source. Japanese Journal of Applied Physics, 17 (5) 937-943 doi:10.1143/jjap.17.937

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Reference TypeJournal (article/letter/editorial)
TitleLow Energy Components of Ions Extracted from an RF Ion Source
JournalJapanese Journal of Applied Physics
AuthorsIshikawa, ItsuoAuthor
Iino, ToshiakiAuthor
Suganomata, ShinjiAuthor
Year1978 (May)Volume17
Issue5
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.17.937Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID14982671Long-form Identifiermindat:1:5:14982671:8
GUID0
Full ReferenceIshikawa, Itsuo, Iino, Toshiaki, Suganomata, Shinji (1978) Low Energy Components of Ions Extracted from an RF Ion Source. Japanese Journal of Applied Physics, 17 (5) 937-943 doi:10.1143/jjap.17.937
Plain TextIshikawa, Itsuo, Iino, Toshiaki, Suganomata, Shinji (1978) Low Energy Components of Ions Extracted from an RF Ion Source. Japanese Journal of Applied Physics, 17 (5) 937-943 doi:10.1143/jjap.17.937
In(1978, May) Japanese Journal of Applied Physics Vol. 17 (5) Japan Society of Applied Physics

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Kobayashi, Hidehiko, Ishikawa, Itsuo, Suganomata, Shinji (1994) Electron Temperature in RF Discharge Plasma ofCF4/N2Mixture. Japanese Journal of Applied Physics, 33. 5979-5980 doi:10.1143/jjap.33.5979
Suganomata, Shinji, Ishikawa, Itsuo (1978) Some Non-Linear Effects on Self-Exciting Wave in SF6Glow Discharge. Japanese Journal of Applied Physics, 17 (8) 1441-1442 doi:10.1143/jjap.17.1441
Ishikawa, Itsuo, Amamiya, Tatsuyuki, Suganomata, Shinji (1992) Photoemission Profiles in Parallel-Plate RF Discharge in SF6Gas. Japanese Journal of Applied Physics, 31. 4037-4039 doi:10.1143/jjap.31.4037
Ishikawa, Itsuo, Sasaki, Shinya, Nagaseki, Kazuya, Saito, Yukinori, Suganomata, Shinji (1996) Positive Ions in RF Discharge Plasma of CF4Gas in a Planar Diode. Japanese Journal of Applied Physics, 35. 4081-4082 doi:10.1143/jjap.35.4081
Hirose, Yuji, Ishikawa, Itsuo, Sasaki, Shinya, Nagaseki, Kazuya, Saito, Yukinori, Suganomata, Shinji (1998) Positive Ions in RF Discharge Plasmas of C4F8/Ar and C4F8/O2Mixtures. Japanese Journal of Applied Physics, 37. 5730-5734 doi:10.1143/jjap.37.5730
Sasaki, Shinya, Ishikawa, Itsuo, Nagaseki, Kazuya, Saito, Yukinori, Suganomata, Shinji (1997) Positive and Negative Ions in RF Plasmas of SF6/N2and SF6/Ar Mixtures in a Planar Diode. Japanese Journal of Applied Physics, 36. 847-853 doi:10.1143/jjap.36.847
Suganomata, Shinji (1964) Some Characteristics of a Pulsed Probe RF Ion Source. Japanese Journal of Applied Physics, 3 (1) 24-26 doi:10.1143/jjap.3.24
Ishikawa, Itsuo, Suganomata, Shinji, Matsumoto, Michio (1987) Attachment-Enhanced Instability in CF4Positive Columns. Japanese Journal of Applied Physics, 26. 2140-2141 doi:10.1143/jjap.26.2140
Suganomata, Shinji, Ishikawa, Itsuo, Matsumoto, Michio, Yamagishi, Hirofumi (1981) Forward Waves Excited by Pulsed Electron Beam Injection into Low-Pressure N2Gas. Japanese Journal of Applied Physics, 20 (5) 999-1000 doi:10.1143/jjap.20.999
Aoyagi, Kenji, Ishikawa, Itsuo, Saito, Yukinori, Suganomata, Shinji (1996) Mode Change of 1 MHz Discharge in O2Gas at Low Pressure. Japanese Journal of Applied Physics, 35. 6248-6251 doi:10.1143/jjap.35.6248
Aoyagi, Kenji, Ishikawa, Itsuo, Nagaseki, Kazuya, Hirose, Yuuji, Saito, Yukinori, Suganomata, Shinji (1997) Characteristics of Parallel-Plate RF Discharges in C4F8Gas and C4F8/O2Mixtures. Japanese Journal of Applied Physics, 36. 5286-5289 doi:10.1143/jjap.36.5286
 
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