Tomimasu, Takio (1987) An Electron Undulating Ring Dedicated to VLSI Lithography. Japanese Journal of Applied Physics, 26. 741-746 doi:10.1143/jjap.26.741
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | An Electron Undulating Ring Dedicated to VLSI Lithography | ||
Journal | Japanese Journal of Applied Physics | ||
Authors | Tomimasu, Takio | Author | |
Year | 1987 (May 20) | Volume | 26 |
Publisher | Japan Society of Applied Physics | ||
DOI | doi:10.1143/jjap.26.741Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 14989712 | Long-form Identifier | mindat:1:5:14989712:1 |
GUID | 0 | ||
Full Reference | Tomimasu, Takio (1987) An Electron Undulating Ring Dedicated to VLSI Lithography. Japanese Journal of Applied Physics, 26. 741-746 doi:10.1143/jjap.26.741 | ||
Plain Text | Tomimasu, Takio (1987) An Electron Undulating Ring Dedicated to VLSI Lithography. Japanese Journal of Applied Physics, 26. 741-746 doi:10.1143/jjap.26.741 | ||
In | (1987) Japanese Journal of Applied Physics Vol. 26. Japan Society of Applied Physics |
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