| Reference Type | Journal (article/letter/editorial) |
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| Title | Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers |
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| Journal | Japanese Journal of Applied Physics |
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| Authors | Murayama, Ken | Author |
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| Gonda, Satoshi | Author |
| Kinoshita, K. | Author |
| Koyanagi, Hajime | Author |
| Terasawa, Tsuneo | Author |
| Hosaka, Sumio | Author |
| Year | 2006 (November 8) | Volume | 45 |
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| Issue | 11 |
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| Publisher | Japan Society of Applied Physics |
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| DOI | doi:10.1143/jjap.45.8832Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 15027268 | Long-form Identifier | mindat:1:5:15027268:9 |
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|
| GUID | 0 |
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| Full Reference | Murayama, Ken, Gonda, Satoshi, Kinoshita, K., Koyanagi, Hajime, Terasawa, Tsuneo, Hosaka, Sumio (2006) Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers. Japanese Journal of Applied Physics, 45 (11) 8832-8838 doi:10.1143/jjap.45.8832 |
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| Plain Text | Murayama, Ken, Gonda, Satoshi, Kinoshita, K., Koyanagi, Hajime, Terasawa, Tsuneo, Hosaka, Sumio (2006) Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers. Japanese Journal of Applied Physics, 45 (11) 8832-8838 doi:10.1143/jjap.45.8832 |
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| In | (2006, November) Japanese Journal of Applied Physics Vol. 45 (11) Japan Society of Applied Physics |
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