| Reference Type | Journal (article/letter/editorial) |
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| Title | Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing |
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| Journal | Japanese Journal of Applied Physics |
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| Authors | Kim, Kyong Nam | Author |
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| Min, Kyung Seok | Author |
| Yeom, Geun Young | Author |
| Year | 2006 (November 8) | Volume | 45 |
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| Issue | 11 |
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| Publisher | Japan Society of Applied Physics |
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| DOI | doi:10.1143/jjap.45.8869Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 15027275 | Long-form Identifier | mindat:1:5:15027275:7 |
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| GUID | 0 |
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| Full Reference | Kim, Kyong Nam, Min, Kyung Seok, Yeom, Geun Young (2006) Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing. Japanese Journal of Applied Physics, 45 (11) 8869-8872 doi:10.1143/jjap.45.8869 |
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| Plain Text | Kim, Kyong Nam, Min, Kyung Seok, Yeom, Geun Young (2006) Characteristics of Large Area Inductively Coupled Plasma Using a Multiple Linear Antennas with U-Type Parallel Connection for Flat Panel Display Processing. Japanese Journal of Applied Physics, 45 (11) 8869-8872 doi:10.1143/jjap.45.8869 |
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| In | (2006, November) Japanese Journal of Applied Physics Vol. 45 (11) Japan Society of Applied Physics |
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