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Ryu, Jaewook, Kim, Jin-Hyuk, Chu, Sung-il, Lee, SeungHun, Moon, Sung (2006) Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements. Japanese Journal of Applied Physics, 45 (12) 9238-9243 doi:10.1143/jjap.45.9238

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Reference TypeJournal (article/letter/editorial)
TitleFabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements
JournalJapanese Journal of Applied Physics
AuthorsRyu, JaewookAuthor
Kim, Jin-HyukAuthor
Chu, Sung-ilAuthor
Lee, SeungHunAuthor
Moon, SungAuthor
Year2006 (December 7)Volume45
Issue12
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.45.9238Search in ResearchGate
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Mindat Ref. ID15027352Long-form Identifiermindat:1:5:15027352:5
GUID0
Full ReferenceRyu, Jaewook, Kim, Jin-Hyuk, Chu, Sung-il, Lee, SeungHun, Moon, Sung (2006) Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements. Japanese Journal of Applied Physics, 45 (12) 9238-9243 doi:10.1143/jjap.45.9238
Plain TextRyu, Jaewook, Kim, Jin-Hyuk, Chu, Sung-il, Lee, SeungHun, Moon, Sung (2006) Fabrication and Mechanical Characterization of Micro Electro Mechanical System Based Vertical Probe Tips for Micro Pad Measurements. Japanese Journal of Applied Physics, 45 (12) 9238-9243 doi:10.1143/jjap.45.9238
In(2006, December) Japanese Journal of Applied Physics Vol. 45 (12) Japan Society of Applied Physics

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