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Yasutake, Masatoshi, Watanabe, Kazutoshi, Wakiyama, Sigeru, Yamaoka, Takehiro (2006) Critical Dimension Measurement Using New Scanning Mode and Aligned Carbon Nanotube Scanning Probe Microscope Tip. Japanese Journal of Applied Physics, 45 (3) 1970-1973 doi:10.1143/jjap.45.1970

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Reference TypeJournal (article/letter/editorial)
TitleCritical Dimension Measurement Using New Scanning Mode and Aligned Carbon Nanotube Scanning Probe Microscope Tip
JournalJapanese Journal of Applied Physics
AuthorsYasutake, MasatoshiAuthor
Watanabe, KazutoshiAuthor
Wakiyama, SigeruAuthor
Yamaoka, TakehiroAuthor
Year2006 (March 27)Volume45
Issue3
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.45.1970Search in ResearchGate
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Mindat Ref. ID15027650Long-form Identifiermindat:1:5:15027650:2
GUID0
Full ReferenceYasutake, Masatoshi, Watanabe, Kazutoshi, Wakiyama, Sigeru, Yamaoka, Takehiro (2006) Critical Dimension Measurement Using New Scanning Mode and Aligned Carbon Nanotube Scanning Probe Microscope Tip. Japanese Journal of Applied Physics, 45 (3) 1970-1973 doi:10.1143/jjap.45.1970
Plain TextYasutake, Masatoshi, Watanabe, Kazutoshi, Wakiyama, Sigeru, Yamaoka, Takehiro (2006) Critical Dimension Measurement Using New Scanning Mode and Aligned Carbon Nanotube Scanning Probe Microscope Tip. Japanese Journal of Applied Physics, 45 (3) 1970-1973 doi:10.1143/jjap.45.1970
In(2006, March) Japanese Journal of Applied Physics Vol. 45 (3) Japan Society of Applied Physics


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