| Reference Type | Journal (article/letter/editorial) |
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| Title | Fabrication and Evaluation of Highly Oriented Ta2O5Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering |
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| Journal | Japanese Journal of Applied Physics |
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| Authors | Kakio, Shoji | Author |
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| Mitsui, Takeshi | Author |
| Tsuchiya, Akinori | Author |
| Nakagawa, Yasuhiko | Author |
| Year | 2010 (July 20) | Volume | 49 |
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| Issue | 7 |
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| Publisher | Japan Society of Applied Physics |
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| DOI | doi:10.1143/jjap.49.07hb06Search in ResearchGate |
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| Generate Citation Formats |
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| Mindat Ref. ID | 15035863 | Long-form Identifier | mindat:1:5:15035863:5 |
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|
| GUID | 0 |
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| Full Reference | Kakio, Shoji, Mitsui, Takeshi, Tsuchiya, Akinori, Nakagawa, Yasuhiko (2010) Fabrication and Evaluation of Highly Oriented Ta2O5Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering. Japanese Journal of Applied Physics, 49 (7) 7 doi:10.1143/jjap.49.07hb06 |
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| Plain Text | Kakio, Shoji, Mitsui, Takeshi, Tsuchiya, Akinori, Nakagawa, Yasuhiko (2010) Fabrication and Evaluation of Highly Oriented Ta2O5Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering. Japanese Journal of Applied Physics, 49 (7) 7 doi:10.1143/jjap.49.07hb06 |
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| In | (2010, July) Japanese Journal of Applied Physics Vol. 49 (7) Japan Society of Applied Physics |
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