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Yagi, Takashi, Oka, Nobuto, Okabe, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.1143/jjap.50.11rb01

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Reference TypeJournal (article/letter/editorial)
TitleEffect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering
JournalJapanese Journal of Applied Physics
AuthorsYagi, TakashiAuthor
Oka, NobutoAuthor
Okabe, TakashiAuthor
Taketoshi, NaoyukiAuthor
Baba, TetsuyaAuthor
Shigesato, YuzoAuthor
Year2011 (November 21)Volume50
Issue11
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.50.11rb01Search in ResearchGate
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Mindat Ref. ID15037151Long-form Identifiermindat:1:5:15037151:1
GUID0
Full ReferenceYagi, Takashi, Oka, Nobuto, Okabe, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.1143/jjap.50.11rb01
Plain TextYagi, Takashi, Oka, Nobuto, Okabe, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.1143/jjap.50.11rb01
In(2011, November) Japanese Journal of Applied Physics Vol. 50 (11) Japan Society of Applied Physics

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Yagi, Takashi, Oka, Nobuto, Okabe, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Effect of Oxygen Impurities on Thermal Diffusivity of AlN Thin Films Deposited by Reactive RF Magnetron Sputtering. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.7567/jjap.50.11rb01
Oka, Nobuto, Kato, Kazuki, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Thermal Boundary Resistance betweenN,N$ '$-Bis(1-naphthyl)-N,N$ '$-diphenylbenzidine and Aluminum Films. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.1143/jjap.50.11rb02
Oka, Nobuto, Kato, Kazuki, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2011) Thermal Boundary Resistance betweenN,N'-Bis(1-naphthyl)-N,N'-diphenylbenzidine and Aluminum Films. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.7567/jjap.50.11rb02
Tasaki, Chihiro, Oka, Nobuto, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Kamiyama, Toshihisa, Nakamura, Shin-ichi, Shigesato, Yuzo (2012) Thermophysical Properties of Transparent Conductive Nb-Doped TiO$_{2}$ Films. Japanese Journal of Applied Physics, 51. 35802 doi:10.1143/jjap.51.035802
Oka, Nobuto, Kato, Kazuki, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Ito, Norihiro, Shigesato, Yuzo (2010) Thermal Diffusivities of Tris(8-hydroxyquinoline)aluminum andN,N'-Di(1-naphthyl)-N,N'-diphenylbenzidine Thin Films with Sub-Hundred Nanometer Thicknesses. Japanese Journal of Applied Physics, 49 (12) 121602 doi:10.1143/jjap.49.121602
Oka, Nobuto, Kimura, Kentaro, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2012) Thermophysical and electrical properties of Al-doped ZnO films. Journal of Applied Physics, 111 (9). 93701pp. doi:10.1063/1.4706572
Tasaki, Chihiro, Oka, Nobuto, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Kamiyama, Toshihisa, Nakamura, Shin-ichi, Shigesato, Yuzo (2012) Thermophysical Properties of Transparent Conductive Nb-Doped TiO2Films. Japanese Journal of Applied Physics, 51 (3) 35802 doi:10.7567/jjap.51.035802
Baba, Tetsuya, Taketoshi, Naoyuki, Yagi, Takashi (2011) Development of Ultrafast Laser Flash Methods for Measuring Thermophysical Properties of Thin Films and Boundary Thermal Resistances. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.1143/jjap.50.11ra01
Ashida, Toru, Miyamura, Amica, Oka, Nobuto, Sato, Yasushi, Yagi, Takashi, Taketoshi, Naoyuki, Baba, Tetsuya, Shigesato, Yuzo (2009) Thermal transport properties of polycrystalline tin-doped indium oxide films. Journal of Applied Physics, 105 (7). 73709pp. doi:10.1063/1.3093684
Taketoshi, Naoyuki, Yagi, Takashi, Baba, Tetsuya (2009) Effect of Synthesis Condition on Thermal Diffusivity of Molybdenum Thin Films Observed by a Picosecond Light Pulse Thermoreflectance Method. Japanese Journal of Applied Physics, 48 (5) 5 doi:10.1143/jjap.48.05ec01
Baba, Tetsuya, Taketoshi, Naoyuki, Yagi, Takashi (2011) Development of Ultrafast Laser Flash Methods for Measuring Thermophysical Properties of Thin Films and Boundary Thermal Resistances. Japanese Journal of Applied Physics, 50 (11) 11 doi:10.7567/jjap.50.11ra01
 
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