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Liang, Yizi, Kato, Kimitaka, Nakamura, Keiji, Sugai, Hideo (2011) Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance. Japanese Journal of Applied Physics, 50 (11) 116101 doi:10.7567/jjap.50.116101

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Reference TypeJournal (article/letter/editorial)
TitleElectron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance
JournalJapanese Journal of Applied Physics
AuthorsLiang, YiziAuthor
Kato, KimitakaAuthor
Nakamura, KeijiAuthor
Sugai, HideoAuthor
Year2011 (November 1)Volume50
Issue11
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.50.116101Search in ResearchGate
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Mindat Ref. ID15037207Long-form Identifiermindat:1:5:15037207:5
GUID0
Full ReferenceLiang, Yizi, Kato, Kimitaka, Nakamura, Keiji, Sugai, Hideo (2011) Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance. Japanese Journal of Applied Physics, 50 (11) 116101 doi:10.7567/jjap.50.116101
Plain TextLiang, Yizi, Kato, Kimitaka, Nakamura, Keiji, Sugai, Hideo (2011) Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance. Japanese Journal of Applied Physics, 50 (11) 116101 doi:10.7567/jjap.50.116101
In(2011, November) Japanese Journal of Applied Physics Vol. 50 (11) Japan Society of Applied Physics

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Liang, Yizi, Kato, Kimitaka, Nakamura, Keiji, Sugai, Hideo (2011) Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance. Japanese Journal of Applied Physics, 50. 116101 doi:10.1143/jjap.50.116101
Pandey, Anil, Sakakibara, Wataru, Matsuoka, Hiroyuki, Nakamura, Keiji, Sugai, Hideo (2016) Time-resolved curling-probe measurements of electron density in high frequency pulsed DC discharges. Japanese Journal of Applied Physics, 55 (1) 16101 doi:10.7567/jjap.55.016101
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Hotta, Masaya, Ogawa, Daisuke, Nakamura, Keiji, Sugai, Hideo (2018) Real-time curling probe monitoring of dielectric layer deposited on plasma chamber wall. Japanese Journal of Applied Physics, 57 (4) 46201 doi:10.7567/jjap.57.046201
Sugai, Hideo, Nakamura, Keiji (2019) Recent innovations in microwave probes for reactive plasma diagnostics. Japanese Journal of Applied Physics, 58 (6) 60101 doi:10.7567/1347-4065/ab1a43
Guo, Ying, Nakamura, Keiji, Zhang, Jing, Nakano, Yoshitaka, Sugai, Hideo (2011) Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons. Japanese Journal of Applied Physics, 50 (1) 1 doi:10.7567/jjap.50.01aa02
Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo (2017) Microwave plasma generation by the fast rotation and slow pulsation of resonant fields in a cylindrical cavity. Japanese Journal of Applied Physics, 56 (4) 46203 doi:10.7567/jjap.56.046203
Nakamura, Keiji, Suzuki, Keiji, Sugai, Hideo (1995) Hot Spots and Electron Heating Processes in a Helicon-Wave Excited Plasma. Japanese Journal of Applied Physics, 34. 2152-2157 doi:10.1143/jjap.34.2152
Suzuki, Keiji, Nakamura, Keiji, Sugai, Hideo (1996) Resonant Directional Excitation of Helicon Waves by a Helical Antenna. Japanese Journal of Applied Physics, 35. 4044-4050 doi:10.1143/jjap.35.4044
Nakamura, Keiji, Segi, Kazunori, Sugai, Hideo (1997) Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry. Japanese Journal of Applied Physics, 36. doi:10.1143/jjap.36.l439
 
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