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Nogami, Hirofumi, Kobayashi, Takeshi, Okada, Hironao, Masuda, Takashi, Maeda, Ryutaro, Itoh, Toshihiro (2012) Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices. Japanese Journal of Applied Physics, 51. 9 doi:10.1143/jjap.51.09ld11

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Reference TypeJournal (article/letter/editorial)
TitleImpact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices
JournalJapanese Journal of Applied Physics
AuthorsNogami, HirofumiAuthor
Kobayashi, TakeshiAuthor
Okada, HironaoAuthor
Masuda, TakashiAuthor
Maeda, RyutaroAuthor
Itoh, ToshihiroAuthor
Year2012 (September 20)Volume51
PublisherJapan Society of Applied Physics
DOIdoi:10.1143/jjap.51.09ld11Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15040922Long-form Identifiermindat:1:5:15040922:1
GUID0
Full ReferenceNogami, Hirofumi, Kobayashi, Takeshi, Okada, Hironao, Masuda, Takashi, Maeda, Ryutaro, Itoh, Toshihiro (2012) Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices. Japanese Journal of Applied Physics, 51. 9 doi:10.1143/jjap.51.09ld11
Plain TextNogami, Hirofumi, Kobayashi, Takeshi, Okada, Hironao, Masuda, Takashi, Maeda, Ryutaro, Itoh, Toshihiro (2012) Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices. Japanese Journal of Applied Physics, 51. 9 doi:10.1143/jjap.51.09ld11
In(2012) Japanese Journal of Applied Physics Vol. 51. Japan Society of Applied Physics

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Nogami, Hirofumi, Kobayashi, Takeshi, Okada, Hironao, Masuda, Takashi, Maeda, Ryutaro, Itoh, Toshihiro (2012) Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices. Japanese Journal of Applied Physics, 51 (9) 9 doi:10.7567/jjap.51.09ld11
Okada, Hironao, Kobayashi, Takeshi, Masuda, Takashi, Itoh, Toshihiro (2009) Ultra-Low Power Event-Driven Wireless Sensor Node Using Piezoelectric Accelerometer for Health Monitoring. Japanese Journal of Applied Physics, 48 (7) 70222 doi:10.1143/jjap.48.070222
Kobayashi, Takeshi, Itoh, Toshihiro, Sawada, Renshi, Maeda, Ryutaro (2007) Tunable Optical Microscanner Driven by Piezoelectric Actuator. Japanese Journal of Applied Physics, 46 (9) 6429-6432 doi:10.1143/jjap.46.6429
Kobayashi, Takeshi, Oyama, Syoji, Takahashi, Masaharu, Maeda, Ryutaro, Itoh, Toshihiro (2008) Microelectromechanical Systems-Based Electrostatic Field Sensor Using Pb(Zr,Ti)O3Thin Films. Japanese Journal of Applied Physics, 47 (9) 7533-7536 doi:10.1143/jjap.47.7533
Yamashita, Takahiro, Okada, Hironao, Itoh, Toshihiro, Kobayashi, Takeshi (2015) Manufacturing process for piezoelectric strain sensor sheet involving transfer printing methods. Japanese Journal of Applied Physics, 54 (10) 10 doi:10.7567/jjap.54.10nd08
Takei, Ryohei, Makimoto, Natsumi, Okada, Hironao, Itoh, Toshihiro, Kobayashi, Takeshi (2016) Design of piezoelectric MEMS cantilever for low-frequency vibration energy harvester. Japanese Journal of Applied Physics, 55 (6) 6 doi:10.7567/jjap.55.06gp14
Kobayashi, Takeshi, Maeda, Ryutaro (2007) Piezoelectric Optical Micro Scanner with Built-in Torsion Sensors. Japanese Journal of Applied Physics, 46 (4) 2781-2784 doi:10.1143/jjap.46.2781
Lu, Jian, Suga, Tadatomo, Zhang, Yi, Itoh, Toshihiro, Maeda, Ryutaro, Mihara, Takashi (2010) Micromachined Silicon Disk Resonator Transduced by Piezoelectric Lead Zirconate Titanate Thin Films. Japanese Journal of Applied Physics, 49 (6) 6 doi:10.1143/jjap.49.06gn17
Chu, Jiaru, Maeda, Ryutaro, Itoh, Toshihiro, Suga, Tadatomo (1999) Tip-Scanning Dynamic Force Microscope Using Piezoelectric Cantilever for Full Wafer Inspection. Japanese Journal of Applied Physics, 38. 7155-7158 doi:10.1143/jjap.38.7155
Lu, Jian, Ikehara, Tsuyoshi, Zhang, Yi, Mihara, Takashi, Itoh, Toshihiro, Maeda, Ryutaro (2007) High Quality Factor Silicon Cantilever Transduced by Piezoelectric Lead Zirconate Titanate Film for Mass Sensing Applications. Japanese Journal of Applied Physics, 46 (12) 7643-7647 doi:10.1143/jjap.46.7643
Takei, Ryohei, Okada, Hironao, Makimoto, Natsumi, Itoh, Toshihiro, Kobayashi, Takeishi (2016) Simulation of an ultralow-power power management circuit for MEMS cantilever piezoelectric vibration energy harvesters. Japanese Journal of Applied Physics, 55 (10) 10 doi:10.7567/jjap.55.10ta06
 
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