Chiang, Chen-Kuo, Wu, Chien-Hung, Liu, Chin-Chien, Lin, Jin-Fu, Yang, Chien-Lun, Wu, Jiun-Yuan, Wang, Shui-Jinn (2012) Characterization of Hf$_{1-x}$Zr$_{x}$O$_{2}$ Gate Dielectrics with $0\leq x\leq 1$ Prepared by Atomic Layer Deposition for Metal Oxide Semiconductor Field Effect Transistor Applications. Japanese Journal of Applied Physics, 51 (1) 11101 doi:10.1143/jjap.51.011101
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Characterization of Hf$_{1-x}$Zr$_{x}$O$_{2}$ Gate Dielectrics with $0\leq x\leq 1$ Prepared by Atomic Layer Deposition for Metal Oxide Semiconductor Field Effect Transistor Applications | ||
| Journal | Japanese Journal of Applied Physics | ||
| Authors | Chiang, Chen-Kuo | Author | |
| Wu, Chien-Hung | Author | ||
| Liu, Chin-Chien | Author | ||
| Lin, Jin-Fu | Author | ||
| Yang, Chien-Lun | Author | ||
| Wu, Jiun-Yuan | Author | ||
| Wang, Shui-Jinn | Author | ||
| Year | 2012 (January) | Volume | 51 |
| Issue | 1 | ||
| Publisher | Japan Society of Applied Physics | ||
| DOI | doi:10.1143/jjap.51.011101Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15041402 | Long-form Identifier | mindat:1:5:15041402:7 |
| GUID | 0 | ||
| Full Reference | Chiang, Chen-Kuo, Wu, Chien-Hung, Liu, Chin-Chien, Lin, Jin-Fu, Yang, Chien-Lun, Wu, Jiun-Yuan, Wang, Shui-Jinn (2012) Characterization of Hf$_{1-x}$Zr$_{x}$O$_{2}$ Gate Dielectrics with $0\leq x\leq 1$ Prepared by Atomic Layer Deposition for Metal Oxide Semiconductor Field Effect Transistor Applications. Japanese Journal of Applied Physics, 51 (1) 11101 doi:10.1143/jjap.51.011101 | ||
| Plain Text | Chiang, Chen-Kuo, Wu, Chien-Hung, Liu, Chin-Chien, Lin, Jin-Fu, Yang, Chien-Lun, Wu, Jiun-Yuan, Wang, Shui-Jinn (2012) Characterization of Hf$_{1-x}$Zr$_{x}$O$_{2}$ Gate Dielectrics with $0\leq x\leq 1$ Prepared by Atomic Layer Deposition for Metal Oxide Semiconductor Field Effect Transistor Applications. Japanese Journal of Applied Physics, 51 (1) 11101 doi:10.1143/jjap.51.011101 | ||
| In | (2012, January) Japanese Journal of Applied Physics Vol. 51 (1) Japan Society of Applied Physics | ||
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