Yamauchi, Toshihiko, Kobayashi, Seiji, Sugibayashi, Hideyuki, Tachibana, Toshiyuki, Naitoh, Shunya, Kanno, Yoshinori, Hiruta, Toshihito (2012) Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01aa02
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna | ||
Journal | Japanese Journal of Applied Physics | ||
Authors | Yamauchi, Toshihiko | Author | |
Kobayashi, Seiji | Author | ||
Sugibayashi, Hideyuki | Author | ||
Tachibana, Toshiyuki | Author | ||
Naitoh, Shunya | Author | ||
Kanno, Yoshinori | Author | ||
Hiruta, Toshihito | Author | ||
Year | 2012 (January 1) | Volume | 51 |
Issue | 1 | ||
Publisher | Japan Society of Applied Physics | ||
DOI | doi:10.7567/jjap.51.01aa02Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 15041595 | Long-form Identifier | mindat:1:5:15041595:6 |
GUID | 0 | ||
Full Reference | Yamauchi, Toshihiko, Kobayashi, Seiji, Sugibayashi, Hideyuki, Tachibana, Toshiyuki, Naitoh, Shunya, Kanno, Yoshinori, Hiruta, Toshihito (2012) Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01aa02 | ||
Plain Text | Yamauchi, Toshihiko, Kobayashi, Seiji, Sugibayashi, Hideyuki, Tachibana, Toshiyuki, Naitoh, Shunya, Kanno, Yoshinori, Hiruta, Toshihito (2012) Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01aa02 | ||
In | (2012, January) Japanese Journal of Applied Physics Vol. 51 (1) Japan Society of Applied Physics |
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