Satoh, Kazuo, Kakehi, Yoshiharu, Uno, Mayumi, Sakurai, Yoshiaki, Yotsuya, Tsutom, Ishida, Takekazu (2012) Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac07
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors | ||
Journal | Japanese Journal of Applied Physics | ||
Authors | Satoh, Kazuo | Author | |
Kakehi, Yoshiharu | Author | ||
Uno, Mayumi | Author | ||
Sakurai, Yoshiaki | Author | ||
Yotsuya, Tsutom | Author | ||
Ishida, Takekazu | Author | ||
Year | 2012 (January 1) | Volume | 51 |
Issue | 1 | ||
Publisher | Japan Society of Applied Physics | ||
DOI | doi:10.7567/jjap.51.01ac07Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 15041609 | Long-form Identifier | mindat:1:5:15041609:0 |
GUID | 0 | ||
Full Reference | Satoh, Kazuo, Kakehi, Yoshiharu, Uno, Mayumi, Sakurai, Yoshiaki, Yotsuya, Tsutom, Ishida, Takekazu (2012) Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac07 | ||
Plain Text | Satoh, Kazuo, Kakehi, Yoshiharu, Uno, Mayumi, Sakurai, Yoshiaki, Yotsuya, Tsutom, Ishida, Takekazu (2012) Electrical Properties of Cr–N Films Deposited by Sputtering: Application to Cryogenic Temperature Sensors. Japanese Journal of Applied Physics, 51 (1) 1 doi:10.7567/jjap.51.01ac07 | ||
In | (2012, January) Japanese Journal of Applied Physics Vol. 51 (1) Japan Society of Applied Physics |
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