Kamata, Tomoyuki, Niwa, Osamu, Umemura, Shigeru, Hirono, Shigeru (2012) The Structure and Bonding State for Fullerene-Like Carbon Nitride Films with High Hardness Formed by Electron Cyclotron Resonance Plasma Sputtering. Japanese Journal of Applied Physics, 51 (12) 125602 doi:10.7567/jjap.51.125602
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | The Structure and Bonding State for Fullerene-Like Carbon Nitride Films with High Hardness Formed by Electron Cyclotron Resonance Plasma Sputtering | ||
Journal | Japanese Journal of Applied Physics | ||
Authors | Kamata, Tomoyuki | Author | |
Niwa, Osamu | Author | ||
Umemura, Shigeru | Author | ||
Hirono, Shigeru | Author | ||
Year | 2012 (December 1) | Volume | 51 |
Issue | 12 | ||
Publisher | Japan Society of Applied Physics | ||
DOI | doi:10.7567/jjap.51.125602Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 15042019 | Long-form Identifier | mindat:1:5:15042019:6 |
GUID | 0 | ||
Full Reference | Kamata, Tomoyuki, Niwa, Osamu, Umemura, Shigeru, Hirono, Shigeru (2012) The Structure and Bonding State for Fullerene-Like Carbon Nitride Films with High Hardness Formed by Electron Cyclotron Resonance Plasma Sputtering. Japanese Journal of Applied Physics, 51 (12) 125602 doi:10.7567/jjap.51.125602 | ||
Plain Text | Kamata, Tomoyuki, Niwa, Osamu, Umemura, Shigeru, Hirono, Shigeru (2012) The Structure and Bonding State for Fullerene-Like Carbon Nitride Films with High Hardness Formed by Electron Cyclotron Resonance Plasma Sputtering. Japanese Journal of Applied Physics, 51 (12) 125602 doi:10.7567/jjap.51.125602 | ||
In | (2012, December) Japanese Journal of Applied Physics Vol. 51 (12) Japan Society of Applied Physics |
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