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Tsuruta, Kazuki, Mito, Masaki, Nagano, Takuma, Katamune, Yuki, Yoshitake, Tsuyoshi (2014) Effect of ultrasonic strain on p-type silicon wafers. Japanese Journal of Applied Physics, 53 (7) 7 doi:10.7567/jjap.53.07kc07

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Reference TypeJournal (article/letter/editorial)
TitleEffect of ultrasonic strain on p-type silicon wafers
JournalJapanese Journal of Applied Physics
AuthorsTsuruta, KazukiAuthor
Mito, MasakiAuthor
Nagano, TakumaAuthor
Katamune, YukiAuthor
Yoshitake, TsuyoshiAuthor
Year2014 (July 1)Volume53
Issue7
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.53.07kc07Search in ResearchGate
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Mindat Ref. ID15043970Long-form Identifiermindat:1:5:15043970:9
GUID0
Full ReferenceTsuruta, Kazuki, Mito, Masaki, Nagano, Takuma, Katamune, Yuki, Yoshitake, Tsuyoshi (2014) Effect of ultrasonic strain on p-type silicon wafers. Japanese Journal of Applied Physics, 53 (7) 7 doi:10.7567/jjap.53.07kc07
Plain TextTsuruta, Kazuki, Mito, Masaki, Nagano, Takuma, Katamune, Yuki, Yoshitake, Tsuyoshi (2014) Effect of ultrasonic strain on p-type silicon wafers. Japanese Journal of Applied Physics, 53 (7) 7 doi:10.7567/jjap.53.07kc07
In(2014, July) Japanese Journal of Applied Physics Vol. 53 (7) Japan Society of Applied Physics


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