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Takeshita, Toshihiro, Makimoto, Natsumi, Nogami, Hirofumi, Sawada, Renshi, Kobayashi, Takeshi (2016) Simulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress. Japanese Journal of Applied Physics, 55 (10) 10 doi:10.7567/jjap.55.10ta11

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Reference TypeJournal (article/letter/editorial)
TitleSimulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress
JournalJapanese Journal of Applied Physics
AuthorsTakeshita, ToshihiroAuthor
Makimoto, NatsumiAuthor
Nogami, HirofumiAuthor
Sawada, RenshiAuthor
Kobayashi, TakeshiAuthor
Year2016 (October 1)Volume55
Issue10
PublisherJapan Society of Applied Physics
DOIdoi:10.7567/jjap.55.10ta11Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15045672Long-form Identifiermindat:1:5:15045672:0
GUID0
Full ReferenceTakeshita, Toshihiro, Makimoto, Natsumi, Nogami, Hirofumi, Sawada, Renshi, Kobayashi, Takeshi (2016) Simulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress. Japanese Journal of Applied Physics, 55 (10) 10 doi:10.7567/jjap.55.10ta11
Plain TextTakeshita, Toshihiro, Makimoto, Natsumi, Nogami, Hirofumi, Sawada, Renshi, Kobayashi, Takeshi (2016) Simulation and fabrication of a MEMS optical scanner device considering deformation caused by internal stress. Japanese Journal of Applied Physics, 55 (10) 10 doi:10.7567/jjap.55.10ta11
In(2016, October) Japanese Journal of Applied Physics Vol. 55 (10) Japan Society of Applied Physics

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