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Darznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N. (2018) Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam. Inorganic Materials, 54 (14) 1417-1420 doi:10.1134/s0020168518140066

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Reference TypeJournal (article/letter/editorial)
TitleElectron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam
JournalInorganic Materials
AuthorsDarznek, S. A.Author
Mityukhlyaev, V. B.Author
Todua, P. A.Author
Filippov, M. N.Author
Year2018 (December)Volume54
Issue14
PublisherPleiades Publishing Ltd
DOIdoi:10.1134/s0020168518140066Search in ResearchGate
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Mindat Ref. ID15065144Long-form Identifiermindat:1:5:15065144:6
GUID0
Full ReferenceDarznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N. (2018) Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam. Inorganic Materials, 54 (14) 1417-1420 doi:10.1134/s0020168518140066
Plain TextDarznek, S. A., Mityukhlyaev, V. B., Todua, P. A., Filippov, M. N. (2018) Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam. Inorganic Materials, 54 (14) 1417-1420 doi:10.1134/s0020168518140066
In(2018, December) Inorganic Materials Vol. 54 (14) Pleiades Publishing Ltd

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Vasil’ev, A. L., Mityukhlyaev, V. B., Mikhutkin, A. A., Todua, P. A., Filippov, M. N. (2017) Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen. Inorganic Materials, 53 (14) 1463-1466 doi:10.1134/s0020168517140163
Filippov, M N, Gavrilenko, V P, Mityukhlyaev, V B, Rakov, A V, Todua, P A (2014) Novel method for dimensional measurements of nanorelief elements based on electron probe defocusing in a scanning electron microscope. Measurement Science and Technology, 25. 44008pp. doi:10.1088/0957-0233/25/4/044008
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