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Norton, G. A., Klody, G. M. (1983) MeV Ion Implantation Systems for Production Processing of Silicon Wafers. IEEE Transactions on Nuclear Science, 30 (2) 1701-1704 doi:10.1109/tns.1983.4332619

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Reference TypeJournal (article/letter/editorial)
TitleMeV Ion Implantation Systems for Production Processing of Silicon Wafers
JournalIEEE Transactions on Nuclear Science
AuthorsNorton, G. A.Author
Klody, G. M.Author
Year1983Volume30
Issue2
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
DOIdoi:10.1109/tns.1983.4332619Search in ResearchGate
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Mindat Ref. ID15568497Long-form Identifiermindat:1:5:15568497:5
GUID0
Full ReferenceNorton, G. A., Klody, G. M. (1983) MeV Ion Implantation Systems for Production Processing of Silicon Wafers. IEEE Transactions on Nuclear Science, 30 (2) 1701-1704 doi:10.1109/tns.1983.4332619
Plain TextNorton, G. A., Klody, G. M. (1983) MeV Ion Implantation Systems for Production Processing of Silicon Wafers. IEEE Transactions on Nuclear Science, 30 (2) 1701-1704 doi:10.1109/tns.1983.4332619
In(1983) IEEE Transactions on Nuclear Science Vol. 30 (2) Institute of Electrical and Electronics Engineers (IEEE)

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Pinto, G., Straatmann, M., Schlyer, D., Currin, J., Hendry, G. (1983) Target Systems for Radioisotope Production. IEEE Transactions on Nuclear Science, 30 (2) 1797-1800 doi:10.1109/tns.1983.4332645
Paulson, W. M. (1983) Ion Implantation into GaAs for Microwave Device Applications. IEEE Transactions on Nuclear Science, 30 (2) 1713-1717 doi:10.1109/tns.1983.4332622
Maletskos, C. J., Hanley, P. R. (1983) Radiation Protection Considerations of Ion Implantation Systems. IEEE Transactions on Nuclear Science, 30 (2) 1592-1596 doi:10.1109/tns.1983.4332592
Smith, T. C. (1979) Silicon Production Applications of Ion Implantation. IEEE Transactions on Nuclear Science, 26 (1) 1677-1682 doi:10.1109/tns.1979.4330461
Alton, G. D. (1983) Theoretical Considerations Associated with the Production of Negative Ions in Sputter-Type Ion Sources. IEEE Transactions on Nuclear Science, 30 (2) 1480-1490 doi:10.1109/tns.1983.4332565
Mourad, W. G. (1983) High Energy Beam Transport System for the 45 MeV Proton LINAC at NEN. IEEE Transactions on Nuclear Science, 30 (2) 1442-1445 doi:10.1109/tns.1983.4332555
Vourvopoulos, G. (1983) Heavy Ion Resonances in the s-d Shell. IEEE Transactions on Nuclear Science, 30 (2) 1119-1123 doi:10.1109/tns.1983.4332468
(1983) IEEE Transactions on Nuclear Science. IEEE Transactions on Nuclear Science, 30 (2) doi:10.1109/tns.1983.4332398
Hutter, G. (1983) Comparison of Three 108-MHz Systems for 1.6 MW. IEEE Transactions on Nuclear Science, 30 (4) 3417-3419 doi:10.1109/tns.1983.4336676
Mourad, W. G., Lankshear, R. F. (1983) Status of the 45 MeV Proton LINAC at NEN. IEEE Transactions on Nuclear Science, 30 (2) 1421-1424 doi:10.1109/tns.1983.4332549
Gossland, M., Balmain, K. G. (1983) Incident Ion Effects on Polymer Surface Discharges. IEEE Transactions on Nuclear Science, 30 (6) 4302-4306 doi:10.1109/tns.1983.4333127
 
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