Khumaini, Khabib, Roh, Hyeonsu, Han, Hyunmin, Kim, Hye-Lee, Kim, Hyo-Suk, Seok, Jang-Hyeon, Park, Jung Woo, Lee, Won-Jun (2023) Surface reaction mechanism of atomic layer deposition of niobium oxide: In situ characterization and first-principle study. Applied Surface Science, 615. 156340 doi:10.1016/j.apsusc.2023.156340
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Surface reaction mechanism of atomic layer deposition of niobium oxide: In situ characterization and first-principle study | ||
| Journal | Applied Surface Science | ||
| Authors | Khumaini, Khabib | Author | |
| Roh, Hyeonsu | Author | ||
| Han, Hyunmin | Author | ||
| Kim, Hye-Lee | Author | ||
| Kim, Hyo-Suk | Author | ||
| Seok, Jang-Hyeon | Author | ||
| Park, Jung Woo | Author | ||
| Lee, Won-Jun | Author | ||
| Year | 2023 (April) | Volume | 615 |
| Publisher | Elsevier BV | ||
| DOI | doi:10.1016/j.apsusc.2023.156340Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 15668823 | Long-form Identifier | mindat:1:5:15668823:1 |
| GUID | 0 | ||
| Full Reference | Khumaini, Khabib, Roh, Hyeonsu, Han, Hyunmin, Kim, Hye-Lee, Kim, Hyo-Suk, Seok, Jang-Hyeon, Park, Jung Woo, Lee, Won-Jun (2023) Surface reaction mechanism of atomic layer deposition of niobium oxide: In situ characterization and first-principle study. Applied Surface Science, 615. 156340 doi:10.1016/j.apsusc.2023.156340 | ||
| Plain Text | Khumaini, Khabib, Roh, Hyeonsu, Han, Hyunmin, Kim, Hye-Lee, Kim, Hyo-Suk, Seok, Jang-Hyeon, Park, Jung Woo, Lee, Won-Jun (2023) Surface reaction mechanism of atomic layer deposition of niobium oxide: In situ characterization and first-principle study. Applied Surface Science, 615. 156340 doi:10.1016/j.apsusc.2023.156340 | ||
| In | (2023) Applied Surface Science Vol. 615. Elsevier BV | ||
See Also
These are possibly similar items as determined by title/reference text matching only.
