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Yen, Chao-Chun, Singh, Anoop Kumar, Chung, Yi-Min, Chou, Hsin-Yu, Wuu, Dong-Sing (2023) Study of Flow Pattern Defects and Oxidation Induced Stacking Faults in Czochralski Single-Crystal Silicon Growth. Crystals, 13 (2) 336 doi:10.3390/cryst13020336

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Reference TypeJournal (article/letter/editorial)
TitleStudy of Flow Pattern Defects and Oxidation Induced Stacking Faults in Czochralski Single-Crystal Silicon Growth
JournalCrystals
AuthorsYen, Chao-ChunAuthor
Singh, Anoop KumarAuthor
Chung, Yi-MinAuthor
Chou, Hsin-YuAuthor
Wuu, Dong-SingAuthor
Year2023 (February 16)Volume13
Issue2
PublisherMDPI AG
DOIdoi:10.3390/cryst13020336Search in ResearchGate
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Mindat Ref. ID15707046Long-form Identifiermindat:1:5:15707046:2
GUID0
Full ReferenceYen, Chao-Chun, Singh, Anoop Kumar, Chung, Yi-Min, Chou, Hsin-Yu, Wuu, Dong-Sing (2023) Study of Flow Pattern Defects and Oxidation Induced Stacking Faults in Czochralski Single-Crystal Silicon Growth. Crystals, 13 (2) 336 doi:10.3390/cryst13020336
Plain TextYen, Chao-Chun, Singh, Anoop Kumar, Chung, Yi-Min, Chou, Hsin-Yu, Wuu, Dong-Sing (2023) Study of Flow Pattern Defects and Oxidation Induced Stacking Faults in Czochralski Single-Crystal Silicon Growth. Crystals, 13 (2) 336 doi:10.3390/cryst13020336
In(2023, January) Crystals Vol. 13 (2) MDPI AG

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Habu, Ryuichi, Tomiura, Azusa (1996) Distribution of Grown-in Crystal Defects in Silicon Crystals Formed by Point Defect Diffusion during Melt-Growth: Disappearance of the Oxidation Induced Stacking Faults-Ring. Japanese Journal of Applied Physics, 35. 1-9 doi:10.1143/jjap.35.1
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Bawa, M.S., Bell, W.J., Grimes, H.M., Shaffner, T.J. (1989) Temperature dependence of oxidation induced stacking faults and oxygen incorporation in dislocation-free Czochralski silicon. Journal of Crystal Growth, 94 (3). 803-806 doi:10.1016/0022-0248(89)90107-3
 
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