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Sheglov, Dmitry V., Rogilo, Dmitry I., Fedina, Liudmila I., Sitnikov, Sergey V., Sysoev, Evgeny V., Latyshev, Alexander V. (2023) Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology. ACS Applied Materials & Interfaces, 15 (9) 12511-12523 doi:10.1021/acsami.2c20154

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Reference TypeJournal (article/letter/editorial)
TitleBottom-Up Generated Height Gauges for Silicon-Based Nanometrology
JournalACS Applied Materials & Interfaces
AuthorsSheglov, Dmitry V.Author
Rogilo, Dmitry I.Author
Fedina, Liudmila I.Author
Sitnikov, Sergey V.Author
Sysoev, Evgeny V.Author
Latyshev, Alexander V.Author
Year2023 (March 8)Volume15
Issue9
PublisherAmerican Chemical Society (ACS)
DOIdoi:10.1021/acsami.2c20154Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID15740141Long-form Identifiermindat:1:5:15740141:9
GUID0
Full ReferenceSheglov, Dmitry V., Rogilo, Dmitry I., Fedina, Liudmila I., Sitnikov, Sergey V., Sysoev, Evgeny V., Latyshev, Alexander V. (2023) Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology. ACS Applied Materials & Interfaces, 15 (9) 12511-12523 doi:10.1021/acsami.2c20154
Plain TextSheglov, Dmitry V., Rogilo, Dmitry I., Fedina, Liudmila I., Sitnikov, Sergey V., Sysoev, Evgeny V., Latyshev, Alexander V. (2023) Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology. ACS Applied Materials & Interfaces, 15 (9) 12511-12523 doi:10.1021/acsami.2c20154
In(2023, March) ACS Applied Materials & Interfaces Vol. 15 (9) American Chemical Society (ACS)

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