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Kamata, Kiichiro, Maeda, Yuuji, Moriyama, Minoru (1986) Hybridization between Si3N4 and SiC films by plasma CVD. Journal of Materials Science Letters, 5 (10) 1051-1054 doi:10.1007/bf01730280

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Reference TypeJournal (article/letter/editorial)
TitleHybridization between Si3N4 and SiC films by plasma CVD
JournalJournal of Materials Science Letters
AuthorsKamata, KiichiroAuthor
Maeda, YuujiAuthor
Moriyama, MinoruAuthor
Year1986 (October)Volume5
Issue10
PublisherSpringer Science and Business Media LLC
DOIdoi:10.1007/bf01730280Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID16409548Long-form Identifiermindat:1:5:16409548:9
GUID0
Full ReferenceKamata, Kiichiro, Maeda, Yuuji, Moriyama, Minoru (1986) Hybridization between Si3N4 and SiC films by plasma CVD. Journal of Materials Science Letters, 5 (10) 1051-1054 doi:10.1007/bf01730280
Plain TextKamata, Kiichiro, Maeda, Yuuji, Moriyama, Minoru (1986) Hybridization between Si3N4 and SiC films by plasma CVD. Journal of Materials Science Letters, 5 (10) 1051-1054 doi:10.1007/bf01730280
In(1986, October) Journal of Materials Science Letters Vol. 5 (10) Springer Science and Business Media LLC

See Also

These are possibly similar items as determined by title/reference text matching only.

Kamata, Kiichiro, Aizawa, Naoyoshi, Moriyama, Minoru (1986) Microhardness and internal stress of Si3N4-SiC films prepared by plasma CVD. Journal of Materials Science Letters, 5 (10) 1055-1057 doi:10.1007/bf01730281
MORIYAMA, Minoru, MAEDA, Yuuji, KAMATA, Kiichiro (1993) D. C. Electrical Conductivity of Si<sub>3</sub>N<sub>4</sub>-SiC Films Prepared by Plasma CVD. Journal of the Ceramic Society of Japan, 101 (1180) 1390-1394 doi:10.2109/jcersj.101.1390
Moriyama, Minoru, Kamata, Kiichiro (1987) Strengthening of glass by amorphous SiN x C y ceramic films. Journal of Materials Science Letters, 6 (10) 1141-1144 doi:10.1007/bf01729163
Moriyama, M., Kamata, K., Tanabe, I. (1991) Mechanical properties of SiNxCx ceramic films prepared by plasma CVD. Journal of Materials Science, 26. 1287-1294 doi:10.1007/bf00544467
Kamata, Kiichiro, Maruyama, Kazunori, Amano, Seiki, Fukazawa, Hiroyuki (1990) Rapid formation of TiO2 films by a conventional CVD method. Journal of Materials Science Letters, 9 (3) 316-319 doi:10.1007/bf00725836
KAMATA, Kiichiro, SAITO, Norio, HAYASHI, Noriyuki, TANABE, Isao, MORIYAMA, Minoru (1990) Mechanical Properties of SiC<sub><i>x</i></sub> Films by Reactive Sputtering. Journal of the Ceramic Society of Japan, 98 (1134) 156-160 doi:10.2109/jcersj.98.156
Saitoh, Hidetoshi, Satoh, Jun, Ishiguro, Takashi, Kamata, Kiichiro, Ichinose, Yukio (1996) Hard Amorphous Boron Nitride Films Prepared by Plasma CVD Technique. Journal of the Japan Institute of Metals, 60 (5). 476-481 doi:10.2320/jinstmet1952.60.5_476
MORIYAMA, Minoru, ICHINO, Tadasu, HAYASHI, Noriyuki, KAMATA, Kiichiro (1993) Thermal Stability of SiN<sub><i>x</i></sub>C<sub><i>y</i></sub> Films Prepared by Plasma CVD. Journal of the Ceramic Society of Japan, 101 (1175) 757-763 doi:10.2109/jcersj.101.757
MARUYAMA, Kazunori, KAMATA, Kiichiro, INOUE, Tohru, TANABE, Isao (1991) Emission Spectra and Morphology of Carbon Films by ECR Plasma CVD. Journal of the Ceramic Society of Japan, 99 (1152) 720-722 doi:10.2109/jcersj.99.720
NAKAYAMA, Masatoshi, UEDA, Kunihiro, SHIBAHARA, Masanori, MARUYAMA, Kazunori, KAMATA, Kiichiro (1990) Bias Effect on the Formation of Carbon Films by RF-Plasma CVD. Journal of the Ceramic Society of Japan, 98 (1138) 597-600 doi:10.2109/jcersj.98.597
MORIYAMA, Minoru, KAMATA, Kiichiro, KOBAYASHI, Yoshikazu (1991) Mechanical and Electrical Properties of Hot-Pressed TiN Ceramics without Additives. Journal of the Ceramic Society of Japan, 99 (1148) 286-291 doi:10.2109/jcersj.99.286
 
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