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Suzuki, Naoki, Shirai, Soichi, Takahashi, Naoko, Inaba, Tadashi, Shiga, Tohru (2011) A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target. Solid State Ionics, 191 (1) 49-54 doi:10.1016/j.ssi.2011.04.001

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Reference TypeJournal (article/letter/editorial)
TitleA lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target
JournalSolid State Ionics
AuthorsSuzuki, NaokiAuthor
Shirai, SoichiAuthor
Takahashi, NaokoAuthor
Inaba, TadashiAuthor
Shiga, TohruAuthor
Year2011 (June)Volume191
Issue1
PublisherElsevier BV
DOIdoi:10.1016/j.ssi.2011.04.001Search in ResearchGate
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Mindat Ref. ID16819310Long-form Identifiermindat:1:5:16819310:5
GUID0
Full ReferenceSuzuki, Naoki, Shirai, Soichi, Takahashi, Naoko, Inaba, Tadashi, Shiga, Tohru (2011) A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target. Solid State Ionics, 191 (1) 49-54 doi:10.1016/j.ssi.2011.04.001
Plain TextSuzuki, Naoki, Shirai, Soichi, Takahashi, Naoko, Inaba, Tadashi, Shiga, Tohru (2011) A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target. Solid State Ionics, 191 (1) 49-54 doi:10.1016/j.ssi.2011.04.001
In(2011, June) Solid State Ionics Vol. 191 (1) Elsevier BV

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Li, Junchao, Lai, Wei (2020) Structure and ionic conduction study on Li3PO4 and LiPON (Lithium phosphorous oxynitride) with the Density-Functional Tight-Binding (DFTB) method. Solid State Ionics, 351. 115329 doi:10.1016/j.ssi.2020.115329
WHITACRE, J (2004) Crystalline Li3Po4/Li4SiO4 solid solutions as an electrolyte for film batteries using sputtered cathode layers. Solid State Ionics, 175 (1) 251-255 doi:10.1016/j.ssi.2003.11.034
Osenciat, Nicolas; Clinton, Erica D.; Casella, Joel; Romio, Alessia; Müller, André; Gilshtein, Evgeniia; Futscher, Moritz H.; Romanyuk, Yaroslav E. (2025) Fast magnetron sputtering of LiPON from carbon-doped Li3PO4 target. Solid State Ionics, 429. doi:10.1016/j.ssi.2025.116957
Fleutot, B., Pecquenard, B., Martinez, H., Levasseur, A. (2013) Lithium borophosphate thin film electrolyte as an alternative to LiPON for solder-reflow processed lithium-ion microbatteries. Solid State Ionics, 249. 49-55 doi:10.1016/j.ssi.2013.07.009
Schwöbel, André, Hausbrand, René, Jaegermann, Wolfram (2015) Interface reactions between LiPON and lithium studied by in-situ X-ray photoemission. Solid State Ionics, 273. 51-54 doi:10.1016/j.ssi.2014.10.017
Sakurai, Yuki, Sakuda, Atsushi, Hayashi, Akitoshi, Tatsumisago, Masahiro (2011) Preparation of amorphous Li4SiO4–Li3PO4 thin films by pulsed laser deposition for all-solid-state lithium secondary batteries. Solid State Ionics, 182 (1) 59-63 doi:10.1016/j.ssi.2010.12.001
Aslam, Mahreen, Kong, Xiang Yang (2016) A lithium ion conductor in Li4SiO4-Li3PO4-LiBO2 ternary system. Solid State Ionics, 293. 72-76 doi:10.1016/j.ssi.2016.06.010
Suzuki, Shinya, Miyayama, Masaru (2011) Ultra-thin film electrodes of tetratitanate nanosheets. Solid State Ionics, 204. 66-72 doi:10.1016/j.ssi.2011.09.025
Xiao, Dong-Li, Tong, Jun, Feng, Ye, Zhong, Guo-Hua, Li, Wen-Jie, Yang, Chun-Lei (2018) Improved performance of all-solid-state lithium batteries using LiPON electrolyte prepared with Li-rich sputtering target. Solid State Ionics, 324. 202-206 doi:10.1016/j.ssi.2018.07.011
Matsuda, Yasutaka, Kuwata, Naoaki, Okawa, Tatsunori, Dorai, Arunkumar, Kamishima, Osamu, Kawamura, Junichi (2019) In situ Raman spectroscopy of Li CoO2 cathode in Li/Li3PO4/LiCoO2 all-solid-state thin-film lithium battery. Solid State Ionics, 335. 7-14 doi:10.1016/j.ssi.2019.02.010
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