Groven, B., Claes, D., Nalin Mehta, A., Bender, H., Vandervorst, W., Heyns, M., Caymax, M., Radu, I., Delabie, A. (2019) Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature. The Journal of Chemical Physics, 150 (10). 104703pp. doi:10.1063/1.5048346
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature | ||
| Journal | The Journal of Chemical Physics | ||
| Authors | Groven, B. | Author | |
| Claes, D. | Author | ||
| Nalin Mehta, A. | Author | ||
| Bender, H. | Author | ||
| Vandervorst, W. | Author | ||
| Heyns, M. | Author | ||
| Caymax, M. | Author | ||
| Radu, I. | Author | ||
| Delabie, A. | Author | ||
| Year | 2019 (March 14) | Volume | 150 |
| Issue | 10 | ||
| Publisher | AIP Publishing | ||
| DOI | doi:10.1063/1.5048346Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 2402761 | Long-form Identifier | mindat:1:5:2402761:8 |
| GUID | 0 | ||
| Full Reference | Groven, B., Claes, D., Nalin Mehta, A., Bender, H., Vandervorst, W., Heyns, M., Caymax, M., Radu, I., Delabie, A. (2019) Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature. The Journal of Chemical Physics, 150 (10). 104703pp. doi:10.1063/1.5048346 | ||
| Plain Text | Groven, B., Claes, D., Nalin Mehta, A., Bender, H., Vandervorst, W., Heyns, M., Caymax, M., Radu, I., Delabie, A. (2019) Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature. The Journal of Chemical Physics, 150 (10). 104703pp. doi:10.1063/1.5048346 | ||
| In | (2019, March) The Journal of Chemical Physics Vol. 150 (10) AIP Publishing | ||
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