Mouat, Aidan R., Mane, Anil U., Elam, Jeffrey W., Delferro, Massimiliano, Marks, Tobin J., Stair, Peter C. (2016) Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition. Chemistry of Materials, 28. 1907-1919 doi:10.1021/acs.chemmater.6b00248
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition | ||
| Journal | Chemistry of Materials | ||
| Authors | Mouat, Aidan R. | Author | |
| Mane, Anil U. | Author | ||
| Elam, Jeffrey W. | Author | ||
| Delferro, Massimiliano | Author | ||
| Marks, Tobin J. | Author | ||
| Stair, Peter C. | Author | ||
| Year | 2016 (March 22) | Volume | 28 |
| Publisher | American Chemical Society (ACS) | ||
| DOI | doi:10.1021/acs.chemmater.6b00248Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 4310095 | Long-form Identifier | mindat:1:5:4310095:8 |
| GUID | 0 | ||
| Full Reference | Mouat, Aidan R., Mane, Anil U., Elam, Jeffrey W., Delferro, Massimiliano, Marks, Tobin J., Stair, Peter C. (2016) Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition. Chemistry of Materials, 28. 1907-1919 doi:10.1021/acs.chemmater.6b00248 | ||
| Plain Text | Mouat, Aidan R., Mane, Anil U., Elam, Jeffrey W., Delferro, Massimiliano, Marks, Tobin J., Stair, Peter C. (2016) Volatile Hexavalent Oxo-amidinate Complexes: Molybdenum and Tungsten Precursors for Atomic Layer Deposition. Chemistry of Materials, 28. 1907-1919 doi:10.1021/acs.chemmater.6b00248 | ||
| In | (2016) Chemistry of Materials Vol. 28. American Chemical Society (ACS) | ||
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