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Inouchi, Yutaka, Tanaka, Hideki, Inami, Hiroshi, Fukumaru, Fumio, Matsunaga, Kouzi (1990) High‐current metal ion beam extraction from a multicusp ion source. Review of Scientific Instruments, 61 (1). 538-540 doi:10.1063/1.1141244

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Reference TypeJournal (article/letter/editorial)
TitleHigh‐current metal ion beam extraction from a multicusp ion source
JournalReview of Scientific Instruments
AuthorsInouchi, YutakaAuthor
Tanaka, HidekiAuthor
Inami, HiroshiAuthor
Fukumaru, FumioAuthor
Matsunaga, KouziAuthor
Year1990 (January)Volume61
Issue1
PublisherAIP Publishing
DOIdoi:10.1063/1.1141244Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4855265Long-form Identifiermindat:1:5:4855265:1
GUID0
Full ReferenceInouchi, Yutaka, Tanaka, Hideki, Inami, Hiroshi, Fukumaru, Fumio, Matsunaga, Kouzi (1990) High‐current metal ion beam extraction from a multicusp ion source. Review of Scientific Instruments, 61 (1). 538-540 doi:10.1063/1.1141244
Plain TextInouchi, Yutaka, Tanaka, Hideki, Inami, Hiroshi, Fukumaru, Fumio, Matsunaga, Kouzi (1990) High‐current metal ion beam extraction from a multicusp ion source. Review of Scientific Instruments, 61 (1). 538-540 doi:10.1063/1.1141244
In(1990, January) Review of Scientific Instruments Vol. 61 (1) AIP Publishing

See Also

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Yamashita, Takatoshi, Inouchi, Yutaka, Fujiwara, Shuichi, Matsuda, Yasuhiro, Inami, Hiroshi, Matsunaga, Kouzi, Matsuda, Koji (1994) Extraction of high current Cr ion beam from a multicusp metal ion source. Review of Scientific Instruments, 65 (4). 1269-1271 doi:10.1063/1.1145030
Matsuda, Yasuhiro, Inami, Hiroshi, Yamashita, Takatoshi, Fujiwara, Shuichi, Inouchi, Yutaka, Matsunaga, Kouzi, Matsuda, Koji (1992) Ion species measurement of high current metal ion beams extracted from a multicusp ion source. Review of Scientific Instruments, 63 (4). 2481-2483 doi:10.1063/1.1142918
Inami, Hiroshi, Fukumaru, Fumio, Inouchi, Yutaka, Sato, Daisuke, Tanaka, Kazuhiko, Matsunaga, Kouzi (1989) Development of high current metal ion beam source. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 37. 198-200 doi:10.1016/0168-583x(89)90168-7
Inouchi, Yutaka, Yamashita, Takatoshi, Fujiwara, Shuichi, Matsuda, Yasuhiro, Inami, Hiroshi, Matsunaga, Kouzi, Matsuda, Koji (1992) Extraction characteristics of a high current metal ion source. Review of Scientific Instruments, 63 (4). 2478-2480 doi:10.1063/1.1142917
Leung, K. N., Keller, R. (1990) A high charge state multicusp ion source. Review of Scientific Instruments, 61 (1). 333-335 doi:10.1063/1.1141286
Mahoney, L., Asmussen, J. (1990) A compact, resonant cavity, five centimeter, multicusp, ECR broad‐beam ion source. Review of Scientific Instruments, 61 (1). 285-287 doi:10.1063/1.1141323
Shiraishi, Hiroshi, Brown, Ian G. (1990) Performance of a high‐current metal vapor vacuum arc ion source. Review of Scientific Instruments, 61 (12). 3775-3782 doi:10.1063/1.1141552
Inami, H., Inouchi, Y., Tanaka, H., Yamashita, T., Matsunaga, K., Matsuda, K. (1991) Development of a high current and high energy metal ion beam system. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 55 (1). 370-373 doi:10.1016/0168-583x(91)96196-r
Langbein, K., Riehl, G., Klein, H., Leung, K. N., Walther, S. R., Keller, R. (1990) Analysis of the ion beam obtained from a small multicusp ion source. Review of Scientific Instruments, 61 (1). 327-329 doi:10.1063/1.1141284
Ishikawa, Junzo, Tsuji, Hiroshi, Aoyama, Yuji, Takagi, Toshinori (1990) Intense metal‐ion‐beam production using an impregnated‐electrode‐type liquid‐metal ion source. Review of Scientific Instruments, 61 (1). 592-594 doi:10.1063/1.1141927
Huixing, Zhang, Xiaoji, Zhang, Fengsheng, Zhou, Shenji, Zhang, Zhuen, Han (1990) High‐current metal‐ion source for ion implantation. Review of Scientific Instruments, 61 (1). 574-576 doi:10.1063/1.1141921
 
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