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Michette, A. G., Turcu, I. C. E., Schulz, M. S., Browne, M. T., Morrison, G. R., Fluck, P., Buckley, C. J., Foster, G. F. (1993) Scanning x‐ray microscopy using a laser‐plasma source. Review of Scientific Instruments, 64 (6). 1478-1482 doi:10.1063/1.1144067

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Reference TypeJournal (article/letter/editorial)
TitleScanning x‐ray microscopy using a laser‐plasma source
JournalReview of Scientific Instruments
AuthorsMichette, A. G.Author
Turcu, I. C. E.Author
Schulz, M. S.Author
Browne, M. T.Author
Morrison, G. R.Author
Fluck, P.Author
Buckley, C. J.Author
Foster, G. F.Author
Year1993 (June)Volume64
Issue6
PublisherAIP Publishing
DOIdoi:10.1063/1.1144067Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4865451Long-form Identifiermindat:1:5:4865451:5
GUID0
Full ReferenceMichette, A. G., Turcu, I. C. E., Schulz, M. S., Browne, M. T., Morrison, G. R., Fluck, P., Buckley, C. J., Foster, G. F. (1993) Scanning x‐ray microscopy using a laser‐plasma source. Review of Scientific Instruments, 64 (6). 1478-1482 doi:10.1063/1.1144067
Plain TextMichette, A. G., Turcu, I. C. E., Schulz, M. S., Browne, M. T., Morrison, G. R., Fluck, P., Buckley, C. J., Foster, G. F. (1993) Scanning x‐ray microscopy using a laser‐plasma source. Review of Scientific Instruments, 64 (6). 1478-1482 doi:10.1063/1.1144067
In(1993, June) Review of Scientific Instruments Vol. 64 (6) AIP Publishing

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Morris, D., Buckley, C. J., Morrison, G. R., Michette, A. G., Anastasi, P. A. F., Browne, M. T., Burge, R. E., Charalambous, P. S., Foster, G. F., Palmer, J. R., Duke, P. J. (1991) Recent advances in scanning x-ray microscopy. Scanning, 13 (1). 7-10 doi:10.1002/sca.4950130103
Morrison, G. R., Bridgwater, S., Browne, M. T., Burge, R. E., Cave, R. C., Charalambous, P. S., Foster, G. F., Hare, A. R., Michette, A. G., Morris, D., Taguchi, T., Duke, P. J. (1989) Development of x‐ray imaging at the Daresbury SRS. Review of Scientific Instruments, 60 (7). 2464-2467 doi:10.1063/1.1140700
Kenney, J M, Morrison, G R, Browne, M T, Buckley, C J, Burge, R E, Cave, R C, Charalambous, P S, Duke, P J, Hare, A R, Hills, C P B, Michette, A G, Ogawa, K, Rogoyski, A M (1989) Evaluation of a scanning transmission x-ray microscope using undulator radiation at the SERC Daresbury Laboratory. Journal of Physics E: Scientific Instruments, 22 (4). 234-238 doi:10.1088/0022-3735/22/4/006
Buckley, C. J., Foster, G. F., Burge, R. E., Ali, S. Y., Scotchford, C. A., Kirz, J., Rivers, M. L. (1992) Elemental imaging of cartilage by scanning x‐ray microscopy. Review of Scientific Instruments, 63 (1). 588-590 doi:10.1063/1.1143804
Turcu, I. C. E., Ross, I. N., Schulz, M. S., Daido, H., Tallents, G. J., Krishnan, J., Dwivedi, L., Hening, A. (1993) Spatial coherence measurements and x‐ray holographic imaging using a laser‐generated plasma x‐ray source in the water window spectral region. Journal of Applied Physics, 73 (12). 8081-8087 doi:10.1063/1.353924
Daido, H., Turcu, I. C. E., Ross, I. N., Watson, J. G., Steyer, M., Kaur, R., Schulz, M. S., Amit, M. (1992) Spatial coherence of a repetitive laser‐plasma point x‐ray source in the water window spectral region. Applied Physics Letters, 60 (10). 1155-1157 doi:10.1063/1.107389
Davis, G. M., Gower, M. C., O’Neill, F., Turcu, I. C. E. (1988) Plasma x‐ray source for lithography generated by a ≊30 J, 30 ns KrF laser. Applied Physics Letters, 53 (17). 1583-1585 doi:10.1063/1.99919
Morrison, G. R., Browne, M. T. (1992) Dark‐field imaging with the scanning transmission x‐ray microscope. Review of Scientific Instruments, 63 (1). 611-614 doi:10.1063/1.1143820
Berry, G. J., Cairns, J. A., Davidson, M. R., Rodley, D. R. G., Thomson, J., Turcu, I. C. E., Shaikh, W. (1998) 1 nm x-ray lithography using novel mask fabrication technique. Review of Scientific Instruments, 69 (9). 3350-3352 doi:10.1063/1.1149099
O'Neill, F., Gower, M. C., Turcu, I. C. E., Owadano, Y. (1986) X-ray lithography using a KrF laser–plasma source. Applied Optics, 25. 464pp. doi:10.1364/ao.25.000464
Michette, A G, Rogoyski, A M, Burge, R E (1988) A laser-generated plasma source for x-ray lithography and VLSI. Journal of Physics E: Scientific Instruments, 21 (10). 959-965 doi:10.1088/0022-3735/21/10/011
 
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