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Kato, Yushi, Ishii, Shigeyuki (1998) Plasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source. Review of Scientific Instruments, 69 (2). 1176-1178 doi:10.1063/1.1148658

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Reference TypeJournal (article/letter/editorial)
TitlePlasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source
JournalReview of Scientific Instruments
AuthorsKato, YushiAuthor
Ishii, ShigeyukiAuthor
Year1998 (February)Volume69
Issue2
PublisherAIP Publishing
DOIdoi:10.1063/1.1148658Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4879495Long-form Identifiermindat:1:5:4879495:6
GUID0
Full ReferenceKato, Yushi, Ishii, Shigeyuki (1998) Plasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source. Review of Scientific Instruments, 69 (2). 1176-1178 doi:10.1063/1.1148658
Plain TextKato, Yushi, Ishii, Shigeyuki (1998) Plasma potential profile in a 2.45 GHz electron cyclotron resonance multicharged ion source. Review of Scientific Instruments, 69 (2). 1176-1178 doi:10.1063/1.1148658
In(1998, February) Review of Scientific Instruments Vol. 69 (2) AIP Publishing

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Kato, Yushi, Sugiyama, Saori, Ishii, Shigeyuki (2002) Experimental study of ion extraction from a 2.45 GHz electron cyclotron resonance multicharged ion source. Review of Scientific Instruments, 73 (2). 601-603 doi:10.1063/1.1427027
Kato, Yushi, Kubo, Yoshiyuki, Ishii, Shigeyuki (1998) Pulse height analysis using Si-pin diode of x-ray irradiated from a 2.45 GHz electron cyclotron resonance multicharged ion source. Review of Scientific Instruments, 69 (2). 1179-1181 doi:10.1063/1.1148659
Kato, Yushi, Ishii, Shigeyuki (1996) Sputteringā€assisted production of multicharged boron ions from solid material in a 2.45 GHz electron cyclotron resonance source. Review of Scientific Instruments, 67 (6). 2171-2175 doi:10.1063/1.1147032
Kato, Yushi, Furuki, Hideyuki, Asaji, Toyohisa, Ishii, Shigeyuki (2004) Production of multicharged ions in a 2.45 GHz electron cyclotron resonance source directly excited in a circular TE01 mode cavity resonator. Review of Scientific Instruments, 75 (5). 1470-1472 doi:10.1063/1.1690442
Kato, Yushi, Kobayashi, Shigeki, Ishii, Shigeyuki (2000) Enhanced production of multi-charged ions using pulse-modulated microwave in a 2.45 GHz electron cyclotron resonance source. Review of Scientific Instruments, 71 (2). 657-659 doi:10.1063/1.1150340
Sekiguchi, M., Matsushita, H., Jonoshita, I., Kabasawa, M. (1998) Development of a 2.45 GHz electron cyclotron resonance ion source for ion-implanter application. Review of Scientific Instruments, 69 (2). 837-839 doi:10.1063/1.1148542
Kato, Y., Ishii, S. (1994) Electron cyclotron resonance multicharged ion source with elemental boron. Review of Scientific Instruments, 65 (4). 1113-1115 doi:10.1063/1.1145081
Sugiyama, Saori, Kato, Yushi, Ishii, Shigeyuki (2002) Production of multiply charged Si and Fe ions from solid materials by sputtering and evaporating methods in a 2.45 GHz ECR source. Review of Scientific Instruments, 73 (2). 542-544 doi:10.1063/1.1430862
Kato, Yushi, Yano, Keisuke, Nishiokada, Takuya, Nagaya, Tomoki, Kimura, Daiju, Kumakura, Sho, Imai, Youta, Hagino, Shogo, Otsuka, Takuro, Sato, Fuminobu (2016) Accessibility condition of wave propagation and multicharged ion production in electron cyclotron resonance ion source plasma. Review of Scientific Instruments, 87 (2). 2pp. doi:10.1063/1.4933031
Muramatsu, M., Kitagawa, A., Sato, S., Tashiro, K., Yamada, S., Shibuya, S., Hattori, T. (1998) Status of 2.45 GHz compact National Institute of Radiological Sciences electron cyclotron resonance ion source. Review of Scientific Instruments, 69 (2). 1076-1078 doi:10.1063/1.1148637
Srivastava, A. K., Asmussen, J., Antaya, T., Harrison, K. (1994) The study of a 2.45 GHz plasma source as a plasma generator for the SCECR electron cyclotron resonance ion source. Review of Scientific Instruments, 65 (4). 1135-1137 doi:10.1063/1.1145038
 
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