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Shibata, Kanetoshi, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi, Miyazaki, Tadaomi (2000) Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films. Review of Scientific Instruments, 71 (12). 4483pp. doi:10.1063/1.1322579

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Reference TypeJournal (article/letter/editorial)
TitleApplication of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films
JournalReview of Scientific Instruments
AuthorsShibata, KanetoshiAuthor
Ito, HiroakiAuthor
Yugami, NoboruAuthor
Nishida, YasushiAuthor
Miyazaki, TadaomiAuthor
Year2000Volume71
Issue12
PublisherAIP Publishing
DOIdoi:10.1063/1.1322579Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4882989Long-form Identifiermindat:1:5:4882989:0
GUID0
Full ReferenceShibata, Kanetoshi, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi, Miyazaki, Tadaomi (2000) Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films. Review of Scientific Instruments, 71 (12). 4483pp. doi:10.1063/1.1322579
Plain TextShibata, Kanetoshi, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi, Miyazaki, Tadaomi (2000) Application of sheet shaped plasma supplemented with radio frequency plasma source for production of thin films. Review of Scientific Instruments, 71 (12). 4483pp. doi:10.1063/1.1322579
In(2000) Review of Scientific Instruments Vol. 71 (12) AIP Publishing

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Shibata, Kanetoshi, Yugami, Noboru, Nishida, Yasushi, Miyazaki, Tadaomi (1996) Control of plasma parameters in sheet‐shaped electron cyclotron resonance heating plasma supplemented with radio frequency discharge. Review of Scientific Instruments, 67 (4). 1502-1507 doi:10.1063/1.1146894
Shibata, Kanetoshi, Yugami, Noboru, Nishida, Yasushi (1994) Sheet‐shaped plasma produced by electron cyclotron resonance heating. Review of Scientific Instruments, 65 (7). 2310-2315 doi:10.1063/1.1144681
Mishra, Lekha Nath, Shibata, Kanetoshi, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi (2004) Characteristics of electron cyclotron resonance plasma generated in a rectangular waveguide by high-power microwave. Review of Scientific Instruments, 75 (1). 84-89 doi:10.1063/1.1630858
Chauhan, Sarvesh S., Rajyaguru, Chirag C., Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi, Yoshida, Tomoyuki (2001) Electron cyclotron resonance light source from TE011 mode microwave plasma. Review of Scientific Instruments, 72 (12). 4344-4347 doi:10.1063/1.1408934
Starodubtsev, Mikhail, Kamal-Al-Hassan, Md., Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi (2004) Low-Frequency Sheath Instability in a Non-Maxwellian Plasma with Energetic Ions. Physical Review Letters, 92 (4). doi:10.1103/physrevlett.92.045003
Higashiguchi, Takeshi, Yugami, Noboru, Gao, Hong, Takahashi, Kenji, Ito, Hiroaki, Nishida, Yasushi (2000) Enlarged Frequency Upshift from DC to AC Radiation Converter using Boundary Effect of Plasma-filled Waveguide. Japanese Journal of Applied Physics, 39. 6578-6579 doi:10.1143/jjap.39.6578
Yugami, Noboru, Niiyama, Toshihiko, Higashiguchi, Takeshi, Gao, Hong, Sasaki, Shigeo, Ito, Hiroaki, Nishida, Yasushi (2002) Experimental observation of short-pulse upshifted frequency microwaves from a laser-created overdense plasma. Physical Review E, 65 (3) doi:10.1103/physreve.65.036505
Kamal-Al-Hassan, Md., Starodubtsev, Mikhail, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi (2003) Excitation of ion-wave wakefield by the resonant absorption of a short pulsed microwave with plasma. Physical Review E, 68 (3) doi:10.1103/physreve.68.036404
Rajyaguru, Chirag, Fuji, Toshiyuki, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi (2001) Observation of ultrahigh-energy electrons by resonance absorption of high-power microwaves in a pulsed plasma. Physical Review E, 64 (1) doi:10.1103/physreve.64.016403
Dorranian, Davoud, Starodubtsev, Mikhail, Kawakami, Hiromichi, Ito, Hiroaki, Yugami, Noboru, Nishida, Yasushi (2003) Radiation from high-intensity ultrashort-laser-pulse and gas-jet magnetized plasma interaction. Physical Review E, 68 (2) doi:10.1103/physreve.68.026409
Ito, H., Yugami, N., Nishida, Y., Sakai, W. (2002) Imaging system for low-density plasma by heterodyne interferometer with fan beam microwave. Review of Scientific Instruments, 73 (12). 4229-4231 doi:10.1063/1.1516833
 
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