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Thiel, B. L., Toth, M., Schroemges, R. P. M., Scholtz, J. J., van Veen, G., Knowles, W. R. (2006) Two-stage gas amplifier for ultrahigh resolution low vacuum scanning electron microscopy. Review of Scientific Instruments, 77 (3). 33705pp. doi:10.1063/1.2183082

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Reference TypeJournal (article/letter/editorial)
TitleTwo-stage gas amplifier for ultrahigh resolution low vacuum scanning electron microscopy
JournalReview of Scientific Instruments
AuthorsThiel, B. L.Author
Toth, M.Author
Schroemges, R. P. M.Author
Scholtz, J. J.Author
van Veen, G.Author
Knowles, W. R.Author
Year2006 (March)Volume77
Issue3
PublisherAIP Publishing
DOIdoi:10.1063/1.2183082Search in ResearchGate
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Mindat Ref. ID4896031Long-form Identifiermindat:1:5:4896031:9
GUID0
Full ReferenceThiel, B. L., Toth, M., Schroemges, R. P. M., Scholtz, J. J., van Veen, G., Knowles, W. R. (2006) Two-stage gas amplifier for ultrahigh resolution low vacuum scanning electron microscopy. Review of Scientific Instruments, 77 (3). 33705pp. doi:10.1063/1.2183082
Plain TextThiel, B. L., Toth, M., Schroemges, R. P. M., Scholtz, J. J., van Veen, G., Knowles, W. R. (2006) Two-stage gas amplifier for ultrahigh resolution low vacuum scanning electron microscopy. Review of Scientific Instruments, 77 (3). 33705pp. doi:10.1063/1.2183082
In(2006, March) Review of Scientific Instruments Vol. 77 (3) AIP Publishing

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Thiel, B L, Toth, Milos, Schroemges, R P M, Scholtz, J J, van Veen, Gerard, Knowles, W R (2004) A Two-Stage Gas Amplification Secondary Electron Detector for Ultra-High Resolution Imaging. Microscopy and Microanalysis, 10. 1058-1059 doi:10.1017/s1431927604884654
Knowles, W. Ralph, Thiel, B L, Toth, Milos, Schroemges, R P M, Scholtz, J J, van Veen, Gerard, Elders, Marcel, Donald, A M (2004) Design of a Two-Stage Gas Amplification Secondary Electron Detector for Imaging Insulating Samples at the sub-1 nm Scale. Microscopy and Microanalysis, 10. 1060-1061 doi:10.1017/s1431927604884228
Tileli, V, Toth, M, Knowles, R, Thiel, BL (2007) Noise Considerations in Low Vacuum Scanning Electron Microscopy. Microscopy and Microanalysis, 13. doi:10.1017/s1431927607077197
Thiel, B L, Toth, M, Knowles, W R (2005) Ultra-High Resolution Imaging and Metrology with Low Vacuum SEM. Microscopy and Microanalysis, 11. doi:10.1017/s1431927605506731
Knowles, W R, Toth, M, Thiel, B, Schroemges, R (2005) Ion Control for Optimized Imaging with a Novel Gaseous Detector. Microscopy and Microanalysis, 11. doi:10.1017/s1431927605506196
Toth, M, Thiel, B L, Coy, M A, Marshman, J G, Knowles, W R (2005) Artifact-Free Imaging of Photolithographic Masks by Environmental Scanning Electron Microscopy. Microscopy and Microanalysis, 11. doi:10.1017/s1431927605508365
Tileli, Vasiliki, Knowles, W. Ralph, Toth, Milos, Thiel, Bradley L. (2009) Noise characteristics of the gas ionization cascade used in low vacuum scanning electron microscopy. Journal of Applied Physics, 106 (1). 14904pp. doi:10.1063/1.3159883
Toth, M., Thiel, B. L., Donald, A. M. (2002) On the role of electron-ion recombination in low vacuum scanning electron microscopy. Journal of Microscopy, 205 (1). 86-95 doi:10.1046/j.0022-2720.2001.00968.x
Toth, Milos, Thiel, Bradley L., Knowles, W. Ralph (2010) Gas Cascade Amplification in Ultra-High-Resolution Environmental Scanning Electron Microcopy. Microscopy and Microanalysis, 16 (6). 805-809 doi:10.1017/s1431927610000425
de Haas, E., Barsingerhorn, W., van der Veen, J. F. (1996) Piezoelectrically driven rotary stage for use in ultrahigh vacuum. Review of Scientific Instruments, 67 (5). 1930-1934 doi:10.1063/1.1146999
Toth, Milos, Knowles, W. Ralph, Phillips, Matthew R. (2007) Imaging deep trap distributions by low vacuum scanning electron microscopy. Applied Physics Letters, 90 (7). 72905pp. doi:10.1063/1.2644159
 
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