Godyak, V. A., Piejak, R. B. (1990) Probe measurements of the space potential in a radio frequency discharge. Journal of Applied Physics, 68 (7). 3157-3162 doi:10.1063/1.346389
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Probe measurements of the space potential in a radio frequency discharge | ||
Journal | Journal of Applied Physics | ||
Authors | Godyak, V. A. | Author | |
Piejak, R. B. | Author | ||
Year | 1990 (October) | Volume | 68 |
Issue | 7 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.346389Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5048811 | Long-form Identifier | mindat:1:5:5048811:9 |
GUID | 0 | ||
Full Reference | Godyak, V. A., Piejak, R. B. (1990) Probe measurements of the space potential in a radio frequency discharge. Journal of Applied Physics, 68 (7). 3157-3162 doi:10.1063/1.346389 | ||
Plain Text | Godyak, V. A., Piejak, R. B. (1990) Probe measurements of the space potential in a radio frequency discharge. Journal of Applied Physics, 68 (7). 3157-3162 doi:10.1063/1.346389 | ||
In | (1990, October) Journal of Applied Physics Vol. 68 (7) AIP Publishing |
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