Mihailescu, I. N., Craciun, V., Nistor, L. C., Teodorescu, V. S., D’Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Drigo, A. V., Ganatsios, S., Zemek, J. (1991) Direct nitridation of a silicon surface by multipulse excimer laser irradiation in a nitrogen‐containing ambient gas. Journal of Applied Physics, 70 (4). 2123-2131 doi:10.1063/1.349449
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Direct nitridation of a silicon surface by multipulse excimer laser irradiation in a nitrogen‐containing ambient gas | ||
Journal | Journal of Applied Physics | ||
Authors | Mihailescu, I. N. | Author | |
Craciun, V. | Author | ||
Nistor, L. C. | Author | ||
Teodorescu, V. S. | Author | ||
D’Anna, E. | Author | ||
Leggieri, G. | Author | ||
Luches, A. | Author | ||
Martino, M. | Author | ||
Perrone, A. | Author | ||
Drigo, A. V. | Author | ||
Ganatsios, S. | Author | ||
Zemek, J. | Author | ||
Year | 1991 (August 15) | Volume | 70 |
Issue | 4 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.349449Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5055251 | Long-form Identifier | mindat:1:5:5055251:1 |
GUID | 0 | ||
Full Reference | Mihailescu, I. N., Craciun, V., Nistor, L. C., Teodorescu, V. S., D’Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Drigo, A. V., Ganatsios, S., Zemek, J. (1991) Direct nitridation of a silicon surface by multipulse excimer laser irradiation in a nitrogen‐containing ambient gas. Journal of Applied Physics, 70 (4). 2123-2131 doi:10.1063/1.349449 | ||
Plain Text | Mihailescu, I. N., Craciun, V., Nistor, L. C., Teodorescu, V. S., D’Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Drigo, A. V., Ganatsios, S., Zemek, J. (1991) Direct nitridation of a silicon surface by multipulse excimer laser irradiation in a nitrogen‐containing ambient gas. Journal of Applied Physics, 70 (4). 2123-2131 doi:10.1063/1.349449 | ||
In | (1991, August) Journal of Applied Physics Vol. 70 (4) AIP Publishing |
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