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Wang, Y.-B., Han, P., Chen, Q., Willander, M. (1997) Scattered refractive index profiles of thin silicon oxide film on silicon substrate. Journal of Applied Physics, 82 (11). 5868-5870 doi:10.1063/1.366404

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Reference TypeJournal (article/letter/editorial)
TitleScattered refractive index profiles of thin silicon oxide film on silicon substrate
JournalJournal of Applied Physics
AuthorsWang, Y.-B.Author
Han, P.Author
Chen, Q.Author
Willander, M.Author
Year1997 (December)Volume82
Issue11
PublisherAIP Publishing
DOIdoi:10.1063/1.366404Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5087474Long-form Identifiermindat:1:5:5087474:1
GUID0
Full ReferenceWang, Y.-B., Han, P., Chen, Q., Willander, M. (1997) Scattered refractive index profiles of thin silicon oxide film on silicon substrate. Journal of Applied Physics, 82 (11). 5868-5870 doi:10.1063/1.366404
Plain TextWang, Y.-B., Han, P., Chen, Q., Willander, M. (1997) Scattered refractive index profiles of thin silicon oxide film on silicon substrate. Journal of Applied Physics, 82 (11). 5868-5870 doi:10.1063/1.366404
In(1997, December) Journal of Applied Physics Vol. 82 (11) AIP Publishing

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