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Dewan, M. N. A., McNally, P. J., Herbert, P. A. F. (2002) Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current. Journal of Applied Physics, 91 (9). 5604-5613 doi:10.1063/1.1462425

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Reference TypeJournal (article/letter/editorial)
TitlePlasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current
JournalJournal of Applied Physics
AuthorsDewan, M. N. A.Author
McNally, P. J.Author
Herbert, P. A. F.Author
Year2002 (May)Volume91
Issue9
PublisherAIP Publishing
DOIdoi:10.1063/1.1462425Search in ResearchGate
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Mindat Ref. ID5114784Long-form Identifiermindat:1:5:5114784:8
GUID0
Full ReferenceDewan, M. N. A., McNally, P. J., Herbert, P. A. F. (2002) Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current. Journal of Applied Physics, 91 (9). 5604-5613 doi:10.1063/1.1462425
Plain TextDewan, M. N. A., McNally, P. J., Herbert, P. A. F. (2002) Plasma modeling for a nonsymmetric capacitive discharge driven by a nonsinusoidal radio frequency current. Journal of Applied Physics, 91 (9). 5604-5613 doi:10.1063/1.1462425
In(2002, May) Journal of Applied Physics Vol. 91 (9) AIP Publishing

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Boeuf, J. P., Belenguer, Ph. (1992) Transition from a capacitive to a resistive regime in a silane radio frequency discharge and its possible relation to powder formation. Journal of Applied Physics, 71 (10). 4751-4754 doi:10.1063/1.350666
Gomez, S., Steen, P. G., Graham, W. G. (2002) Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma. Applied Physics Letters, 81 (1). 19-21 doi:10.1063/1.1490630
Felsteiner, J., Slutsker, Ya. Z., Vaisberg, P. M. (2005) Characteristics of a low-frequency-driven ferroinductor-coupled discharge. Journal of Applied Physics, 98 (9). 93305pp. doi:10.1063/1.2128474
Sansonnens, L., Schmitt, J. (2003) Shaped electrode and lens for a uniform radio-frequency capacitive plasma. Applied Physics Letters, 82 (2). 182-184 doi:10.1063/1.1534918
Hatch, Albert J., Heuckroth, L. E. (1970) Retuning Effects and Dynamic Instability of a Radio‐Frequency Capacitive Discharge. Journal of Applied Physics, 41 (4). 1701-1706 doi:10.1063/1.1659094
Diomede, P, Longo, S, Economou, D J, Capitelli, M (2012) Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen. Journal of Physics D: Applied Physics, 45. 175204pp. doi:10.1088/0022-3727/45/17/175204
Dunaevsky, A., Raitses, Y., Fisch, N. J. (2006) Plasma acceleration from radio-frequency discharge in dielectric capillary. Applied Physics Letters, 88 (25). 251502pp. doi:10.1063/1.2214127
Garrigues, L., Bareilles, J., Boeuf, J. P., Boyd, I. D. (2002) Modeling of the plasma jet of a stationary plasma thruster. Journal of Applied Physics, 91 (12). 9521pp. doi:10.1063/1.1480480
Howling, A. A., Sansonnens, L., Ballutaud, J., Hollenstein, Ch., Schmitt, J. P. M. (2004) Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors. Journal of Applied Physics, 96 (10). 5429-5440 doi:10.1063/1.1803608
Ikeda, Y., Verboncoeur, J. P., Christenson, P. J., Birdsall, C. K. (1999) Global modeling of a dielectric barrier discharge in Ne–Xe mixtures for an alternating current plasma display panel. Journal of Applied Physics, 86 (5). 2431-2441 doi:10.1063/1.371072
Ganguly, B. N., Bletzinger, P. (1994) Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge. Journal of Applied Physics, 76 (3). 1476-1479 doi:10.1063/1.357722
 
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