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Cheng, Y. H., Tay, B. K., Lau, S. P., Kupfer, H., Richter, F. (2002) Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc. Journal of Applied Physics, 92 (4). 1845-1849 doi:10.1063/1.1491588

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Reference TypeJournal (article/letter/editorial)
TitleSubstrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc
JournalJournal of Applied Physics
AuthorsCheng, Y. H.Author
Tay, B. K.Author
Lau, S. P.Author
Kupfer, H.Author
Richter, F.Author
Year2002 (August 15)Volume92
Issue4
PublisherAIP Publishing
DOIdoi:10.1063/1.1491588Search in ResearchGate
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Mindat Ref. ID5116232Long-form Identifiermindat:1:5:5116232:4
GUID0
Full ReferenceCheng, Y. H., Tay, B. K., Lau, S. P., Kupfer, H., Richter, F. (2002) Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc. Journal of Applied Physics, 92 (4). 1845-1849 doi:10.1063/1.1491588
Plain TextCheng, Y. H., Tay, B. K., Lau, S. P., Kupfer, H., Richter, F. (2002) Substrate bias dependence of Raman spectra for TiN films deposited by filtered cathodic vacuum arc. Journal of Applied Physics, 92 (4). 1845-1849 doi:10.1063/1.1491588
In(2002, August) Journal of Applied Physics Vol. 92 (4) AIP Publishing

See Also

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Cheng, Y. H., Tay, B. K., Lau, S. P., Shi, X. (2001) Raman spectroscopy and x-ray diffraction studies of (Ti,Al)N films deposited by filtered cathodic vacuum arc at room temperature. Journal of Applied Physics, 89 (11). 6192-6197 doi:10.1063/1.1352564
Cheng, Y. H., Tay, B. K., Lau, S. P., Shi, X. (2002) Erratum: “Raman spectroscopy and x-ray diffraction studies of (Ti, Al)N films deposited by filtered cathodic vacuum arc at room temperature” [J. Appl. Phys. 89, 6192 (2001)]. Journal of Applied Physics, 91 (12). 10231pp. doi:10.1063/1.1483106
TAY, B. K., CHENG, Y. H., LAU, S. P., SHI, X. (2002) CARBON NANOCOMPOSITE THIN FILMS PREPARED BY FILTERED CATHODIC VACUUM ARC TECHNIQUE. International Journal of Modern Physics B, 16 (6). 933-945 doi:10.1142/s0217979202010646
Wang, Y. G., Lau, S. P., Lee, H. W., Yu, S. F., Tay, B. K., Zhang, X. H., Tse, K. Y., Hng, H. H. (2003) Comprehensive study of ZnO films prepared by filtered cathodic vacuum arc at room temperature. Journal of Applied Physics, 94 (3). 1597-1604 doi:10.1063/1.1592007
Ding, Xing-zhao, Li, Y. J., Sun, Z., Tay, B. K., Lau, S. P., Chen, G. Y., Cheung, W. Y., Wong, S. P. (2000) Electron field emission from Ti-containing tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc. Journal of Applied Physics, 88 (11). 6842-6847 doi:10.1063/1.1323541
Gan, Zhenghao, Zhang, Yuebin, Yu, Guoqing, Tan, C. M., Lau, S. P., Tay, B. K. (2004) Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc. Journal of Applied Physics, 95 (7). 3509-3515 doi:10.1063/1.1667005
Cheng, Y. H., Tay, B. K., Lau, S. P., Shi, X., Qiao, X. L., Chen, J. G., Wu, Y. P., Sun, Z. H., Xie, C. S. (2002) Synthesis of Superhard and Elastic Carbon Nitride Films by Filtered Cathodic Vacuum arc Combined with Radio Frequency Ion Beam Source. Journal of Materials Research, 17 (3) 521-524 doi:10.1557/jmr.2002.0072
Ji, X H, Lau, S P, Yu, G Q, Zhong, W H, Tay, B K (2004) Structural properties and nanoindentation of AlN films by a filtered cathodic vacuum arc at low temperature. Journal of Physics D: Applied Physics, 37. 1472-1477 doi:10.1088/0022-3727/37/10/009
Cheng, Y.H, Tay, B.K (2003) Development of texture in TiN films deposited by filtered cathodic vacuum arc. Journal of Crystal Growth, 252 (1). 257-264 doi:10.1016/s0022-0248(03)00871-6
Zhao, Z W, Tay, B K, Yu, G Q, Lau, S P (2003) Optical properties of filtered cathodic vacuum arc-deposited zirconium oxide thin films. Journal of Physics: Condensed Matter, 15 (45). 7707-7715 doi:10.1088/0953-8984/15/45/010
Ji, X H, Lau, S P, Yu, G Q, Zhong, W H, Wang, Y G, Tay, B K (2003) Nitrogen-ion-energy dependent optical and structural properties of AlN films obtained using a filtered cathodic vacuum arc. Journal of Physics D: Applied Physics, 36. 2543-2547 doi:10.1088/0022-3727/36/20/018
 
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