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Liu, Z.-J., Jiang, N., Shen, Y. G., Mai, Y.-W. (2002) Atomic force microscopy study of surface roughening of sputter-deposited TiN thin films. Journal of Applied Physics, 92 (7). 3559-3563 doi:10.1063/1.1504497

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Reference TypeJournal (article/letter/editorial)
TitleAtomic force microscopy study of surface roughening of sputter-deposited TiN thin films
JournalJournal of Applied Physics
AuthorsLiu, Z.-J.Author
Jiang, N.Author
Shen, Y. G.Author
Mai, Y.-W.Author
Year2002 (October)Volume92
Issue7
PublisherAIP Publishing
DOIdoi:10.1063/1.1504497Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5116885Long-form Identifiermindat:1:5:5116885:0
GUID0
Full ReferenceLiu, Z.-J., Jiang, N., Shen, Y. G., Mai, Y.-W. (2002) Atomic force microscopy study of surface roughening of sputter-deposited TiN thin films. Journal of Applied Physics, 92 (7). 3559-3563 doi:10.1063/1.1504497
Plain TextLiu, Z.-J., Jiang, N., Shen, Y. G., Mai, Y.-W. (2002) Atomic force microscopy study of surface roughening of sputter-deposited TiN thin films. Journal of Applied Physics, 92 (7). 3559-3563 doi:10.1063/1.1504497
In(2002, October) Journal of Applied Physics Vol. 92 (7) AIP Publishing

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Saitou, M., Makabe, A., Tomoyose, T. (2000) Atomic force microscopy study of oscillatory surface roughening in anodic dissolution of sputter-deposited nickel films. The Journal of Chemical Physics, 113 (6). 2397-2399 doi:10.1063/1.482054
Liu, Z.-J., Zhang, C. H., Shen, Y. G., Mai, Y.-W. (2004) Monte Carlo simulation of nanocrystalline TiN/amorphous SiNx composite films. Journal of Applied Physics, 95 (2). 758-760 doi:10.1063/1.1633650
Zhang, X. T., Liu, Y. C., Zhang, L. G., Zhang, J. Y., Lu, Y. M., Shen, D. Z., Xu, W., Zhong, G. Z., Fan, X. W., Kong, X. G. (2002) Structure and optically pumped lasing from nanocrystalline ZnO thin films prepared by thermal oxidation of ZnS thin films. Journal of Applied Physics, 92 (6). 3293-3298 doi:10.1063/1.1498958
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Liu, Z.-J., Shen, Y. G. (2003) Roughening kinetics of thin films in the presence of both stress and Ehrlich–Schwobel barrier. Applied Physics Letters, 83 (26). 5404-5406 doi:10.1063/1.1637448
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Luo, G. M., Jiang, H. W., Cai, J. W., Liu, C. X., Mai, Z. H., Lai, W. Y., Wang, J., Ding, Y. F. (2002) Elemental distribution at the interfaces of NiMn/Co multilayers by x-ray anomalous scattering. Journal of Applied Physics, 92 (9). 5386-5390 doi:10.1063/1.1510594
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