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Ostrikov, K. N., Denysenko, I. B., Tsakadze, E. L., Xu, S., Storer, R. G. (2002) Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes. Journal of Applied Physics, 92 (9). 4935-4946 doi:10.1063/1.1510598

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Reference TypeJournal (article/letter/editorial)
TitleDiagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes
JournalJournal of Applied Physics
AuthorsOstrikov, K. N.Author
Denysenko, I. B.Author
Tsakadze, E. L.Author
Xu, S.Author
Storer, R. G.Author
Year2002 (November)Volume92
Issue9
PublisherAIP Publishing
DOIdoi:10.1063/1.1510598Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID5117305Long-form Identifiermindat:1:5:5117305:6
GUID0
Full ReferenceOstrikov, K. N., Denysenko, I. B., Tsakadze, E. L., Xu, S., Storer, R. G. (2002) Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes. Journal of Applied Physics, 92 (9). 4935-4946 doi:10.1063/1.1510598
Plain TextOstrikov, K. N., Denysenko, I. B., Tsakadze, E. L., Xu, S., Storer, R. G. (2002) Diagnostics and two-dimensional simulation of low-frequency inductively coupled plasmas with neutral gas heating and electron heat fluxes. Journal of Applied Physics, 92 (9). 4935-4946 doi:10.1063/1.1510598
In(2002, November) Journal of Applied Physics Vol. 92 (9) AIP Publishing

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Tsakadze, E. L., Ostrikov, K. N., Xu, S., Storer, R., Sugai, H. (2002) Inductively coupled plasmas sustained by an internal oscillating current. Journal of Applied Physics, 91 (4). 1804-1813 doi:10.1063/1.1430893
Tsakadze, E. L., Ostrikov, K. N., Xu, , Jones, I. R., Storer, R., Yu, M. Y., Lee, S. (2001) Effect of an internal rotating current on low-frequency inductively coupled plasmas. Physical Review E, 63 (4) doi:10.1103/physreve.63.046402
TSAKADZE, E., OSTRIKOV, K., TSAKADZE, Z., JIANG, N., AHMAD, R., XU, S. (2002) CONTROL AND DIAGNOSTICS OF INDUCTIVELY COUPLED PLASMAS FOR CHEMICAL VAPOUR DEPOSITION ON NANOCOMPOSITE CARBON NITRIDE-BASED FILMS. International Journal of Modern Physics B, 16 (6). 1143-1147 doi:10.1142/s0217979202011019
Tsakadze, E L, Ostrikov, K N, Xu, S, Long, J, Jiang, N, Tsakadze, Z L, Yu, M Y, Storer, R (2001) Turning Points, Power Transfer, and Frequency Response of Mode Transitions in RF Plasmas. Physica Scripta, 64 (4). 360-365 doi:10.1238/physica.regular.064a00360
Ostrikov, K. N., Xu, S., Yu, M. Y. (2000) Power transfer and mode transitions in low-frequency inductively coupled plasmas. Journal of Applied Physics, 88 (5). 2268-2271 doi:10.1063/1.1289055
Denysenko, I. B., Xu, S., Long, J. D., Rutkevych, P. P., Azarenkov, N. A., Ostrikov, K. (2004) Inductively coupled Ar/CH4/H2 plasmas for low-temperature deposition of ordered carbon nanostructures. Journal of Applied Physics, 95 (5). 2713-2724 doi:10.1063/1.1642762
Tsakadze, E. L., Ostrikov, K., Tsakadze, Z. L., Xu, S. (2005) Generation of uniform plasmas by crossed internal oscillating current sheets: Key concepts and experimental verification. Journal of Applied Physics, 97 (1). 13301pp. doi:10.1063/1.1826214
Materer, N., Goodman, Rory S., Leone, Stephen R. (1998) Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking. Journal of Applied Physics, 83 (4). 1917-1923 doi:10.1063/1.366916
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Rutkevych, P P, Ostrikov, K, Denysenko, I B, Storer, R G, Xu, S (2004) Simulation of Gas-Phase Nanoparticle Dynamics in the Plasma-Enhanced Chemical Vapor Deposition of Carbon Nanostructures. Physica Scripta, 70 (5). 322-325 doi:10.1088/0031-8949/70/5/010
 
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