Schroeder, T., Lupina, G., Sohal, R., Lippert, G., Wenger, Ch., Seifarth, O., Tallarida, M., Schmeisser, D. (2007) Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2−xO3 (x=0–2) dielectrics on TiN for dynamic random access memory applications. Journal of Applied Physics, 102 (1). 14103pp. doi:10.1063/1.2749468
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2−xO3 (x=0–2) dielectrics on TiN for dynamic random access memory applications | ||
Journal | Journal of Applied Physics | ||
Authors | Schroeder, T. | Author | |
Lupina, G. | Author | ||
Sohal, R. | Author | ||
Lippert, G. | Author | ||
Wenger, Ch. | Author | ||
Seifarth, O. | Author | ||
Tallarida, M. | Author | ||
Schmeisser, D. | Author | ||
Year | 2007 (July) | Volume | 102 |
Issue | 1 | ||
Publisher | AIP Publishing | ||
DOI | doi:10.1063/1.2749468Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 5149443 | Long-form Identifier | mindat:1:5:5149443:6 |
GUID | 0 | ||
Full Reference | Schroeder, T., Lupina, G., Sohal, R., Lippert, G., Wenger, Ch., Seifarth, O., Tallarida, M., Schmeisser, D. (2007) Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2−xO3 (x=0–2) dielectrics on TiN for dynamic random access memory applications. Journal of Applied Physics, 102 (1). 14103pp. doi:10.1063/1.2749468 | ||
Plain Text | Schroeder, T., Lupina, G., Sohal, R., Lippert, G., Wenger, Ch., Seifarth, O., Tallarida, M., Schmeisser, D. (2007) Synchrotron radiation x-ray photoelectron spectroscopy study on the interface chemistry of high-k PrxAl2−xO3 (x=0–2) dielectrics on TiN for dynamic random access memory applications. Journal of Applied Physics, 102 (1). 14103pp. doi:10.1063/1.2749468 | ||
In | (2007, July) Journal of Applied Physics Vol. 102 (1) AIP Publishing |
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